Ambient Low Temperature Plasma Etching of Polymer Films for Secondary Ion Mass Spectrometry Molecular Depth Profiling

2012 ◽  
Vol 84 (24) ◽  
pp. 10763-10767 ◽  
Author(s):  
Shin Muramoto ◽  
Matthew E. Staymates ◽  
Tim M. Brewer ◽  
Greg Gillen
Keyword(s):  
Mass Spectrometry ◽  
Low Temperature ◽  
Plasma Etching ◽  
Polymer Films ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Low Temperature Plasma ◽  
Temperature Plasma ◽  
Molecular Depth Profiling ◽  
Secondary Ion

Gas Cluster Ion Beams for Secondary Ion Mass Spectrometry

2018 ◽  
Vol 11 (1) ◽  
pp. 29-48 ◽  
Author(s):  
Nicholas Winograd
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Ion Beams ◽  
High Yield ◽  
Ion Mass Spectrometry ◽  
Molecular Depth Profiling ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Secondary Ion

Gas cluster ion beams (GCIBs) provide new opportunities for bioimaging and molecular depth profiling with secondary ion mass spectrometry (SIMS). These beams, consisting of clusters containing thousands of particles, initiate desorption of target molecules with high yield and minimal fragmentation. This review emphasizes the unique opportunities for implementing these sources, especially for bioimaging applications. Theoretical aspects of the cluster ion/solid interaction are developed to maximize conditions for successful mass spectrometry. In addition, the history of how GCIBs have become practical laboratory tools is reviewed. Special emphasis is placed on the versatility of these sources, as size, kinetic energy, and chemical composition can be varied easily to maximize lateral resolution, hopefully to less than 1 micron, and to maximize ionization efficiency. Recent examples of bioimaging applications are also presented.

scholarly journals 3-D Molecular Depth Profiling of Biological and Polymeric Materials Using Time-of-Flight Secondary Ion Mass Spectrometry

2013 ◽  
Vol 19 (S2) ◽  
pp. 664-665
Author(s):  
P.A. Clark ◽  
E. Tallarek ◽  
D. Breitenstein ◽  
B. Hagenhoff ◽  
N. Havercroft
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Time Of Flight ◽  
Depth Profiling ◽  
Polymeric Materials ◽  
Ion Mass Spectrometry ◽  
Molecular Depth Profiling ◽  
Secondary Ion

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

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