Matrix calibration for the quantitative analysis of layered semiconductors by secondary ion mass spectrometry

A. A. Galuska; G. H. Morrison

doi:10.1021/ac00263a010

Matrix calibration for the quantitative analysis of layered semiconductors by secondary ion mass spectrometry

Analytical Chemistry ◽

10.1021/ac00263a010 ◽

1983 ◽

Vol 55 (13) ◽

pp. 2051-2055 ◽

Cited By ~ 19

Author(s):

A. A. Galuska ◽

G. H. Morrison

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Layered Semiconductors ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Quantitative Analysis of Small Amounts of Oxygen in Titanium by Secondary Ion Mass Spectrometry

Journal of the Japan Institute of Metals and Materials ◽

10.2320/jinstmet1952.57.12_1421 ◽

1993 ◽

Vol 57 (12) ◽

pp. 1421-1425

Author(s):

Hiroyuki Takeshita ◽

Yoichi Tomii ◽

Toshio Oishi ◽

Katsutoshi Ono

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Methods for quantitative analysis in secondary ion mass spectrometry

Scanning ◽

10.1002/sca.4950030206 ◽

1980 ◽

Vol 3 (2) ◽

pp. 110-118 ◽

Cited By ~ 31

Author(s):

Dale E. Newbury

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Standards Study For Quantitative Analysis Of Trace Elements In Biological Tissue Using Secondary Ion Mass Spectrometry.

Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society ◽

10.1109/iembs.1992.589513 ◽

1992 ◽

Author(s):

Boumati ◽

Escaig ◽

Sommer ◽

Inglebert ◽

Mountfort ◽

...

Keyword(s):

Mass Spectrometry ◽

Trace Elements ◽

Quantitative Analysis ◽

Biological Tissue ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Quantitative analysis of boron in steel by secondary ion mass spectrometry using ion-implanted iron as standard

Materials Science and Engineering ◽

10.1016/0025-5416(87)90202-3 ◽

1987 ◽

Vol 90 ◽

pp. 119-125 ◽

Cited By ~ 13

Author(s):

S. Hashimoto ◽

S. Doi ◽

K. Takahashi ◽

M. Terasaka ◽

M. Iwaki

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Ion Implanted

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Quantitative analysis with electron microprobes and secondary ion mass spectrometry

Microchemical Journal ◽

10.1016/0026-265x(74)90082-4 ◽

1974 ◽

Vol 19 (2) ◽

pp. 221-222

Author(s):

Kurt F.J. Heinrich

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Quantitative Analysis Using Secondary Ion Mass Spectrometry.

Journal of the Mass Spectrometry Society of Japan ◽

10.5702/massspec.49.16 ◽

2001 ◽

Vol 49 (1) ◽

pp. 16-20 ◽

Cited By ~ 3

Author(s):

Yoshikazu HOMMA ◽

Satoru KUROSAWA

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Factors affecting precision and accuracy in quantitative analysis by secondary ion mass spectrometry

Analytical Chemistry ◽

10.1021/ac00192a035 ◽

1989 ◽

Vol 61 (17) ◽

pp. 1946-1948 ◽

Cited By ~ 18

Author(s):

Ray Chern. Deng ◽

Peter. Williams

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Factors Affecting ◽

Ion Mass Spectrometry ◽

Precision And Accuracy ◽

Secondary Ion

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Quantitative analysis and depth profiling of rare gases in solids by secondary-ion mass spectrometry : detection of (CsR)+ molecular ions (R = rare gas)

Vacuum ◽

10.1016/0042-207x(89)91001-4 ◽

1989 ◽

Vol 39 (10) ◽

pp. 1002

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Depth Profiling ◽

Molecular Ions ◽

Rare Gas ◽

Rare Gases ◽

Mass Spectrometry Detection ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Quantitative analysis in chemically dissimilar matrices by secondary ion mass spectrometry

Applications of Surface Science ◽

10.1016/0378-5963(83)90020-x ◽

1983 ◽

Vol 15 (1-4) ◽

pp. 247-254 ◽

Cited By ~ 2

Author(s):

W. Katz ◽

G.A. Smith ◽

C.-Y. Wei

Keyword(s):

Mass Spectrometry ◽

Quantitative Analysis ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Standards study for quantitative analysis of trace elements in biological tissue using secondary ion mass spectrometry

Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society ◽

10.1109/iembs.1992.5760870 ◽

1992 ◽

Author(s):

P. Boumati ◽

F. Escaig ◽

F. Sommer ◽

R L. Inglebert ◽

S A. Mountfort ◽

...

Keyword(s):

Mass Spectrometry ◽

Trace Elements ◽

Quantitative Analysis ◽

Biological Tissue ◽

Secondary Ion Mass Spectrometry ◽

Ion Mass Spectrometry ◽

Secondary Ion

Download Full-text