Determination of phosphorus distribution in the silicon dioxide/silicon layer system by secondary ion mass spectrometry

1988 ◽  
Vol 60 (15) ◽  
pp. 1524-1529 ◽  
Author(s):  
Gerhard. Stingeder
1994 ◽  
Vol 80 (12) ◽  
pp. 902-907 ◽  
Author(s):  
Hiroyasu FUJIWARA ◽  
Nobutoshi MURAO ◽  
Eiji ICHISE

2007 ◽  
Vol 106 (1-2) ◽  
pp. 89-94 ◽  
Author(s):  
L. R. Sheppard ◽  
M. F. Zhou ◽  
A. Atanacio ◽  
T. Bak ◽  
J. Nowotny ◽  
...  

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