Absolute determination of surface atomic concentration by reflection electron energy-loss spectroscopy
Reflection electron energy-loss spectroscopy (REELS) has been demonstrated as a useful technique for analyzing the structure of crystal surfaces. It is a combination of EELS with reflection electron microscopy (REM) performed in a transmission electron microscope. Here, we suggest a basic theory and experiment which enable REELS to determine absolutely the atomic concentration (atoms per unit volume) at a crystal surface.In the RHEED case, not all the incident electrons will travel an equal distance within the sample (fig. 1A). Under the surface-resonance condition, the incident electrons are propagating parallel or nearly parallel to the crystal surface. Then a mean travelling distance (MTD) D can be defined, along which the excitation of atomic inner shells is equivalent to the total excitation of the atomic inner shells in the dynamical scattering (fig. IB). It can be found from the analysis of experimental data as:(1)