Direct simulation Monte Carlo modeling of metal vapor flows in application to thin film deposition

Ayyaswamy Venkattraman; Alina A. Alexeenko

doi:10.1016/j.vacuum.2012.02.044

Direct simulation Monte Carlo modeling of metal vapor flows in application to thin film deposition

Vacuum ◽

10.1016/j.vacuum.2012.02.044 ◽

2012 ◽

Vol 86 (11) ◽

pp. 1748-1758 ◽

Cited By ~ 18

Author(s):

Ayyaswamy Venkattraman ◽

Alina A. Alexeenko

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Metal Vapor ◽

Thin Film Deposition ◽

Film Deposition ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Thin film deposition by pulsed laser ablation: the direct simulation Monte Carlo

10.1117/12.334405 ◽

1998 ◽

Author(s):

Nickolay Y. Bykov ◽

German A. Lukianov

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Laser Ablation ◽

Pulsed Laser ◽

Direct Simulation Monte Carlo ◽

Pulsed Laser Ablation ◽

Thin Film Deposition ◽

Film Deposition ◽

Direct Simulation ◽

Simulation Monte Carlo

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Parallel unstructed dynamic grid direct simulation Monte Carlo of molecular gas dynamics and the associated thin-film deposition

Computational Fluid and Solid Mechanics ◽

10.1016/b978-008043944-0/50921-5 ◽

2001 ◽

pp. 1376-1380 ◽

Cited By ~ 1

Author(s):

Abhinav Singh ◽

Zhao Yong

Keyword(s):

Thin Film ◽

Monte Carlo ◽

Gas Dynamics ◽

Direct Simulation Monte Carlo ◽

Thin Film Deposition ◽

Film Deposition ◽

Molecular Gas ◽

Direct Simulation ◽

Simulation Monte Carlo

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Direct Simulation Monte Carlo Modeling of Gas Electronic Excitation for Hypersonic Sensing

Journal of Thermophysics and Heat Transfer ◽

10.2514/1.t5058 ◽

2017 ◽

Vol 31 (4) ◽

pp. 858-870

Author(s):

Jonathan M. Burt ◽

Eswar Josyula

Keyword(s):

Monte Carlo ◽

Electronic Excitation ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Direct Simulation Monte Carlo modeling of viscous interactions

10.2514/6.1999-3453 ◽

1999 ◽

Cited By ~ 1

Author(s):

Michael Gallis ◽

Timothy Bartel

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Direct simulation monte carlo modeling of ionized metal physical vapor deposition for semiconductor processing

2009 IEEE International Conference on Plasma Science - Abstracts ◽

10.1109/plasma.2009.5227277 ◽

2009 ◽

Author(s):

Hao Deng ◽

Takashi Ozawa ◽

Deborah Levin ◽

Mark J. Kushner ◽

Larry Gochberg

Keyword(s):

Monte Carlo ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Semiconductor Processing ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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DIRECT-SIMULATION MONTE CARLO MODELING ON TWO-DIMENSIONAL RAYLEIGH-BÉNARD INSTABILITIES OF RAREFIED GAS

Numerical Heat Transfer Part A Applications ◽

10.1080/10407780590916977 ◽

2005 ◽

Vol 47 (8) ◽

pp. 805-823 ◽

Cited By ~ 12

Author(s):

Pei-Yuan Tzeng ◽

Ming-Ho Liu

Keyword(s):

Monte Carlo ◽

Rarefied Gas ◽

Direct Simulation Monte Carlo ◽

Two Dimensional ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo ◽

Rayleigh Benard

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Direct simulation Monte Carlo modeling of e-beam metal deposition

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3386592 ◽

2010 ◽

Vol 28 (4) ◽

pp. 916-924 ◽

Cited By ~ 20

Author(s):

A. Venkattraman ◽

A. A. Alexeenko

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Metal Deposition ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Direct Simulation Monte Carlo Modeling of Near-Continuum Flows with Chemical Reactions

Rarefied Gas Dynamics: Theory and Simulations ◽

10.2514/5.9781600866319.0208.0217 ◽

1994 ◽

pp. 208-217

Keyword(s):

Monte Carlo ◽

Chemical Reactions ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Direct simulation Monte Carlo modeling of H2–O2 deflagration waves

Combustion and Flame ◽

10.1016/j.combustflame.2018.09.001 ◽

2018 ◽

Vol 198 ◽

pp. 40-53 ◽

Cited By ~ 10

Author(s):

Israel B. Sebastião ◽

Li Qiao ◽

Alina Alexeenko

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Simulation Monte Carlo

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Direct simulation Monte Carlo modeling of relaxation processes in polyatomic gases

Physics of Fluids ◽

10.1063/1.4940989 ◽

2016 ◽

Vol 28 (2) ◽

pp. 027103 ◽

Cited By ~ 15

Author(s):

M. Pfeiffer ◽

P. Nizenkov ◽

A. Mirza ◽

S. Fasoulas

Keyword(s):

Monte Carlo ◽

Direct Simulation Monte Carlo ◽

Relaxation Processes ◽

Direct Simulation ◽

Monte Carlo Modeling ◽

Polyatomic Gases ◽

Simulation Monte Carlo

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