Improved flow conditions in diamond hot filament CVD—Promising deposition results and gas phase characterization by laser absorption spectroscopy

Vacuum ◽  
2007 ◽  
Vol 81 (5) ◽  
pp. 619-626 ◽  
Author(s):  
J. Hirmke ◽  
A. Glaser ◽  
F. Hempel ◽  
G.D. Stancu ◽  
J. Röpcke ◽  
...  
2007 ◽  
Vol 29 (3) ◽  
pp. 133-137 ◽  
Author(s):  
J. Hirmke ◽  
S. Schwarz ◽  
F. Hempel ◽  
G. D. Stancu ◽  
J. Röpcke ◽  
...  

1991 ◽  
Vol 01 (C7) ◽  
pp. C7-471-C7-476
Author(s):  
A. CAMPARGUE ◽  
M. CHENEVIER ◽  
A. DELON ◽  
R. JOST ◽  
F. STOECKEL

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