Dielectric substrate self-bias and plasma confinement in two-dimensional scanning radio frequency plasma-enhanced chemical vapour deposition

Vacuum ◽  
2006 ◽  
Vol 81 (4) ◽  
pp. 441-445
Author(s):  
Y. Yin ◽  
Y.Q. Pan ◽  
L. Hang ◽  
M.M.M. Bilek ◽  
D. McKenzie ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Dielectric Substrate ◽  
Radio Frequency Plasma ◽  
Two Dimensional ◽  
Plasma Confinement ◽  
Self Bias ◽  
Frequency Plasma

Effect of pre-deposited carbon layer on the formation of carbon nitride nanostructures prepared by radio-frequency plasma enhanced chemical vapour deposition

2011 ◽  
Vol 130 (1-2) ◽  
pp. 218-222 ◽  
Author(s):  
Noor Hamizah Khanis ◽  
Richard Ritikos ◽  
Maisara Othman ◽  
Nur Maisarah Abdul Rashid ◽  
Siti Meriam Ab Gani ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Carbon Layer ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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