scholarly journals Improved critical temperature of superconducting plasma-enhanced atomic layer deposition of niobium nitride thin films by thermal annealing

2020 ◽  
Vol 709 ◽  
pp. 138232
Author(s):  
Liang Tian ◽  
Ivane Bottala-Gambetta ◽  
Victor Marchetto ◽  
Manoël Jacquemin ◽  
Alexandre Crisci ◽  
...  
Keyword(s):  
Thin Films ◽  
Critical Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Annealing ◽  
Atomic Layer ◽  
Niobium Nitride ◽  
Layer Deposition

Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition

2012 ◽  
Vol 26 (2) ◽  
pp. 025008 ◽  
Author(s):  
Mario Ziegler ◽  
Ludwig Fritzsch ◽  
Julia Day ◽  
Sven Linzen ◽  
Solveig Anders ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Niobium Nitride ◽  
Layer Deposition ◽  
Metal Organic

scholarly journals Improving the Luminescent Properties of Atomic Layer Deposition Eu:Y 2 O 3 Thin Films through Optimized Thermal Annealing

2020 ◽  
Vol 217 (8) ◽  
pp. 1900909 ◽  
Author(s):  
Marion Scarafagio ◽  
Alexandre Tallaire ◽  
Marie-Hélène Chavanne ◽  
Michel Cassir ◽  
Armelle Ringuedé ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Thermal Annealing ◽  
Atomic Layer ◽  
Luminescent Properties ◽  
Layer Deposition

Rapid thermal annealing of Sb2Te3 thin films grown via atomic layer deposition

2020 ◽  
Vol 700 ◽  
pp. 137922
Author(s):  
Tommi Tynell ◽  
Kevin Geishendorf ◽  
Sabrina Piontek ◽  
Tim Komossa ◽  
Stephan Schulz ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Atomic Layer ◽  
Layer Deposition
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