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2016 ◽  
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Michael Schneider ◽  
Iva Bogdanović Radović ◽  
Zdravko Siketić ◽  
Daniel Maurer ◽  
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Thin Films ◽  
Low Temperature ◽  
Plasma Source ◽  
Source Process ◽  
Low Temperature Deposition ◽  
Temperature Deposition

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Gregory T. Stauf ◽  
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Thin Films ◽  
Low Temperature ◽  
Phase Change ◽  
Phase Change Memory ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
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Glass Substrates ◽  
Dc Sputtering ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
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