Spectroscopic ellipsometry study of compound-induced changes in chemical and optical properties of In2O3:Sn–ZnO:Al films

2016 ◽  
Vol 618 ◽  
pp. 107-113 ◽  
Author(s):  
Keh-moh Lin ◽  
Sin-Wei Wu ◽  
Sin-Bo Wang ◽  
Liang-Yan Li ◽  
Yutaka Sawada
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Induced Changes

THERMAL STABILITY STUDY OF TANTALUM NITRIDE THIN FILMS BY SPECTROSCOPIC ELLIPSOMETRY

2004 ◽  
Vol 03 (04n05) ◽  
pp. 489-497
Author(s):  
H. XIE ◽  
B. H. TAN ◽  
P. A. COLLIER ◽  
F. L. NG
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Stability Study ◽  
Tantalum Nitride ◽  
Modeling And Analysis ◽  
Nominal Thickness ◽  
Different Temperatures ◽  
Induced Changes

Spectroscopic ellipsometry was successfully applied in the evaluation of the thermal stability of thin films in air by detecting the changes in film optical properties and thickness. Tantalum nitride ( Ta x N y) films with a nominal thickness of 30 nm were deposited on silicon wafer and annealed at different temperatures from 200°C to 700°C. Annealing-induced changes in thickness and optical properties of Ta x N y were detected and determined by spectroscopic ellipsometry. Different approaches were adopted in the modeling and analysis of spectroscopic ellipsometric data. The results are consistent with the findings from Fourier Transform Infrared Spectroscopy (FTIR).

scholarly journals Optical Characterization of Ultra-Thin Films of Azo-Dye-Doped Polymers Using Ellipsometry and Surface Plasmon Resonance Spectroscopy

Photonics ◽  
2021 ◽  
Vol 8 (2) ◽  
pp. 41
Author(s):  
Najat Andam ◽  
Siham Refki ◽  
Hidekazu Ishitobi ◽  
Yasushi Inouye ◽  
Zouheir Sekkat
Keyword(s):  
Refractive Index ◽  
Optical Properties ◽  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Spectroscopic Ellipsometry ◽  
Plasmon Resonance ◽  
Complex Refractive Index ◽  
Resonance Spectroscopy ◽  
Doped Polymers

The determination of optical constants (i.e., real and imaginary parts of the complex refractive index (nc) and thickness (d)) of ultrathin films is often required in photonics. It may be done by using, for example, surface plasmon resonance (SPR) spectroscopy combined with either profilometry or atomic force microscopy (AFM). SPR yields the optical thickness (i.e., the product of nc and d) of the film, while profilometry and AFM yield its thickness, thereby allowing for the separate determination of nc and d. In this paper, we use SPR and profilometry to determine the complex refractive index of very thin (i.e., 58 nm) films of dye-doped polymers at different dye/polymer concentrations (a feature which constitutes the originality of this work), and we compare the SPR results with those obtained by using spectroscopic ellipsometry measurements performed on the same samples. To determine the optical properties of our film samples by ellipsometry, we used, for the theoretical fits to experimental data, Bruggeman’s effective medium model for the dye/polymer, assumed as a composite material, and the Lorentz model for dye absorption. We found an excellent agreement between the results obtained by SPR and ellipsometry, confirming that SPR is appropriate for measuring the optical properties of very thin coatings at a single light frequency, given that it is simpler in operation and data analysis than spectroscopic ellipsometry.

Optical properties of Sub-30 nm-thick ZnS films studied by spectroscopic ellipsometry

2022 ◽  
Vol 142 ◽  
pp. 106454
Author(s):  
Cheng Wang ◽  
Chong Ma ◽  
Junbo He ◽  
Weiming Liu ◽  
Xudan Zhu ◽  
...  
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Zns Films

Optical properties of amorphous hydrogenated carbon films: A spectroscopic ellipsometry study

1987 ◽  
Vol 2 (5) ◽  
pp. 645-647 ◽  
Author(s):  
Shuhan Lin ◽  
Shuguang Chen
Keyword(s):  
Optical Properties ◽  
Spectroscopic Ellipsometry ◽  
Carbon Films ◽  
Index Of Refraction ◽  
The Real ◽  
Complex Index ◽  
Tentative Explanation ◽  
Amorphous Hydrogenated Carbon ◽  
Ellipsometry Data ◽  
Complex Index Of Refraction

Optical properties of plasma-deposited amorphous hydrogenated carbon films were studied by spectroscopic ellipsometry. From the ellipsometry data, the real and imaginary parts, n and k, of the complex index of refraction of the film have been deduced for photon energies between 2.0 and 4.0 eV for as-grown as well as for thermally annealed films. Here n and k showed considerable variation with subsequent annealing, even under 400°C. A tentative explanation of the results is proposed.

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