Structural and dielectric characterization of sputtered Tantalum Titanium Oxide thin films for high temperature capacitor applications

2016 ◽  
Vol 606 ◽  
pp. 127-132 ◽  
Author(s):  
A. Rouahi ◽  
F. Challali ◽  
I. Dakhlaoui ◽  
C. Vallée ◽  
S. Salimy ◽  
...  
Keyword(s):  
Thin Films ◽  
High Temperature ◽  
Titanium Oxide ◽  
Oxide Thin Films ◽  
Dielectric Characterization

X-ray, optical and electrical characterization of doped nanocrystalline titanium oxide thin films

2004 ◽  
Vol 109 (1-3) ◽  
pp. 249-251 ◽  
Author(s):  
J Domaradzki ◽  
E.L Prociow ◽  
D Kaczmarek ◽  
T Berlicki ◽  
A Podhorodecki ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Electrical Characterization ◽  
Oxide Thin Films ◽  
X Ray ◽  
Nanocrystalline Titanium

scholarly journals Characterization of Birefringent Titanium-Oxide Thin Films Deposited by DC Sputtering

2017 ◽  
Vol 12 (1) ◽  
pp. 42-46
Author(s):  
H. P. De Araújo ◽  
S. G. Dos Santos Filho
Keyword(s):  
Thin Films ◽  
Titanium Oxide ◽  
Narrow Band ◽  
Polarized Light ◽  
Oxide Thin Films ◽  
Tio2 Thin Films ◽  
Dc Sputtering ◽  
Fabry Perot ◽  
Light Beams

This work presents the characterization of birefringent properties of titanium-oxide thin films using spectrophotometry and double-cavity Fabry-Perot structures. All films were deposited by DC sputtering over tilted substrates and the birefringence was characterized as a function of the deposition angle by the numerical difference between the refractive indexes for s- and p-polarized light beams. As a result, the highest value of birefringence (0.03) was obtained for samples tilted at 21º (having the normal axis as reference). A polarizing narrow-band Fabry-Perot filter centered at 400 and 700nm was designed by means of numerical simulations of the multilayer structures using a MATLAB© toolbox to solve the classical optical equations. Using this designed double-cavity Fabry-Perot structure [Ag(40nm) / TiO2(160nm) / Ag(40nm) / TiO2(164nm) / Ag(40nm)], transmittance ratios (Tp/Ts) for p- and s-polarized light beams resulted 1.70 at a wavelength of 699nm and 1.36 at another wavelength of 393nm (centers of the two narrow-band peaks), which corroborated the birefringent characteristics of the nearly-stoichiometric titania (TiO2) thin films.

Spray pyrolysis deposition and characterization of titanium oxide thin films

2003 ◽  
Vol 77 (3) ◽  
pp. 938-944 ◽  
Author(s):  
L Castañeda ◽  
J.C Alonso ◽  
A Ortiz ◽  
E Andrade ◽  
J.M Saniger ◽  
...  
Keyword(s):  
Thin Films ◽  
Spray Pyrolysis ◽  
Titanium Oxide ◽  
Oxide Thin Films ◽  
Spray Pyrolysis Deposition

Characterization of titanium oxide thin films anodically grown in phosphoric acid

2004 ◽  
Vol 29 (4) ◽  
pp. 105-114-103
Author(s):  
Mohy-eddine Khadiri ◽  
Abdelaziz Benyaïch ◽  
Amane Oueriagli ◽  
Abdelkhader Outzourhit ◽  
El Hassani Lahcen Ameziane
Keyword(s):  
Thin Films ◽  
Phosphoric Acid ◽  
Titanium Oxide ◽  
Oxide Thin Films

Synthesis and characterization of tin (IV) oxide thin films

2021 ◽  
Vol 53 (5) ◽  
Author(s):  
M. Rahayi ◽  
M. H. Ehsani ◽  
Agnes C. Nkele ◽  
M. M. Shahidi ◽  
Fabian I. Ezema
Keyword(s):  
Thin Films ◽  
Synthesis And Characterization ◽  
Oxide Thin Films
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