Oxidation and crystallization behavior of calcium europium silicon nitride thin films during rapid thermal processing

2016 ◽  
Vol 603 ◽  
pp. 342-347 ◽  
Author(s):  
M. de Jong ◽  
V.E. van Enter ◽  
E.W. Schuring ◽  
E. van der Kolk
Keyword(s):  
Thin Films ◽  
Silicon Nitride ◽  
Thermal Processing ◽  
Crystallization Behavior ◽  
Rapid Thermal Processing

Rapid Thermal Processing of Ferroelectric Thin Films

1991 ◽  
Vol 224 ◽  
Author(s):  
Zheng Wu ◽  
Roberto Pascual ◽  
C.V.R. Vasant Kumar ◽  
David Amd ◽  
Michael Sayer
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Thermal Processing ◽  
Crystallization Behavior ◽  
Sol Gel ◽  
Rapid Thermal Processing ◽  
Lead Zirconate ◽  
Dielectric Constants ◽  
Heating Rates ◽  
Pzt Films

AbstractThe preparation of ferroelectric lead zirconate titanate (PZT) thin films by rapid thermal processing (RTP) is reported. The films were deposited by chemical sol gel and physical sputter techniques. The heating rate of RTP was found to have significant influence on the crystallization behavior. Faster heating rates lead to lowering of the crystallization temperature and reduction of grain size. PZT films were obtained with dielectric constants ~ 1000, remanent polarizations between 20 and 30μC/cm2, coercive fields 20 to 60kV/cm, and no significant fatigue for 109 to 1010 stressing cycles.

Rapid thermal processing of zirconia thin films produced by the sol‐gel method

1991 ◽  
Vol 70 (4) ◽  
pp. 2348-2352 ◽  
Author(s):  
R. Pascual ◽  
M. Sayer ◽  
C. V. R. Vasant Kumar ◽  
Lichun Zou
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Sol Gel ◽  
Rapid Thermal Processing ◽  
Gel Method ◽  
Sol Gel Method

Effects of doping and rapid thermal processing in Y doped CdO thin films

2019 ◽  
Vol 776 ◽  
pp. 259-265 ◽  
Author(s):  
Mengting Xie ◽  
Wei Zhu ◽  
Kin Man Yu ◽  
Zishu Zhu ◽  
Guanzhong Wang
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Cdo Thin Films

scholarly journals Rapid thermal processing of self-assembling block copolymer thin films

2013 ◽  
Vol 24 (31) ◽  
pp. 315601 ◽  
Author(s):  
F Ferrarese Lupi ◽  
T J Giammaria ◽  
M Ceresoli ◽  
G Seguini ◽  
K Sparnacci ◽  
...  
Keyword(s):  
Thin Films ◽  
Block Copolymer ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Self Assembling

Surface microstructure of CIS thin films produced by rapid thermal processing

1994 ◽  
Vol 35 ◽  
pp. 129-139 ◽  
Author(s):  
W. Riedl ◽  
J. Rimmasch ◽  
V. Probst ◽  
F. Karg ◽  
R. Guckenberger
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Surface Microstructure

Fine Tuning of Lithographic Masks through Thin Films of PS-b-PMMA with Different Molar Mass by Rapid Thermal Processing

2014 ◽  
Vol 6 (10) ◽  
pp. 7180-7188 ◽  
Author(s):  
Federico Ferrarese Lupi ◽  
Tommaso Jacopo Giammaria ◽  
Gabriele Seguini ◽  
Francesco Vita ◽  
Oriano Francescangeli ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Molar Mass ◽  
Rapid Thermal Processing ◽  
Fine Tuning ◽  
Lithographic Masks

Effects of rapid thermal processing on chemically deposited antimony sulfide thin films

2018 ◽  
Vol 80 ◽  
pp. 9-17 ◽  
Author(s):  
V. Vinayakumar ◽  
C.R. Obregón Hernández ◽  
S. Shaji ◽  
D.A. Avellaneda ◽  
J.A. Aguilar Martinez ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Antimony Sulfide

AgSb(SxSe1-x)2thin films by rapid thermal processing of Sb2S3-Ag-Se thin films for photovoltaic applications

2015 ◽  
Vol 13 (1) ◽  
pp. 47-52 ◽  
Author(s):  
Dorian Leonardo Rodriguez Vela ◽  
Bindu Krishnan ◽  
Josue Amilcar Aguilar Martinez ◽  
Shadai Lugo Loredo ◽  
Sadasivan Shaji
Keyword(s):  
Thin Films ◽  
Thermal Processing ◽  
Rapid Thermal Processing ◽  
Photovoltaic Applications
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