Dielectric spectroscopy of electron beam deposited yttrium oxide films examined in metal–insulator–metal sandwich type structures

2014 ◽  
Vol 551 ◽  
pp. 188-194 ◽  
Author(s):  
Tadeusz Wiktorczyk ◽  
Piotr Biegański
Keyword(s):  
Electron Beam ◽  
Yttrium Oxide ◽  
Dielectric Spectroscopy ◽  
Oxide Films ◽  
Metal Insulator ◽  
Metal Insulator Metal ◽  
Sandwich Type

Electrical property improvements of yttrium oxide-based metal-insulator-metal capacitors

2006 ◽  
Vol 24 (3) ◽  
pp. 459-466 ◽  
Author(s):  
C. Durand ◽  
C. Vallée ◽  
C. Dubourdieu ◽  
M. Kahn ◽  
M. Derivaz ◽  
...  
Keyword(s):  
Electrical Property ◽  
Yttrium Oxide ◽  
Metal Insulator ◽  
Metal Insulator Metal

Temperature stability of thin anodic oxide films in metal/insulator/metal structures: A comparison between tantalum and aluminium oxide

2006 ◽  
Vol 500 (1-2) ◽  
pp. 330-335 ◽  
Author(s):  
Yanka Jeliazova ◽  
Michael Kayser ◽  
Beate Mildner ◽  
Achim Walter Hassel ◽  
Detlef Diesing
Keyword(s):  
Oxide Films ◽  
Aluminium Oxide ◽  
Temperature Stability ◽  
Anodic Oxide ◽  
Metal Insulator ◽  
Metal Structures ◽  
Anodic Oxide Films ◽  
Metal Insulator Metal

Yttrium oxide films prepared by electron-beam evaporation

1970 ◽  
Vol 6 (5) ◽  
pp. R61-R63 ◽  
Author(s):  
M. Sayer ◽  
M.Suzanne Martin ◽  
N.J. Hellicar
Keyword(s):  
Electron Beam ◽  
Yttrium Oxide ◽  
Oxide Films ◽  
Electron Beam Evaporation

Modeling, Fabrication, and Electrical Testing of Metal-Insulator-Metal Diode

2011 ◽  
Author(s):  
Terrance O'Regan ◽  
Matthew Chin ◽  
Cheng Tan ◽  
Anthony Birdwell
Keyword(s):  
Metal Insulator ◽  
Metal Insulator Metal
Sign in / Sign up

Export Citation Format

Share Document