Evaluation of depth distribution and characterization of nanoscale Ta/Si multilayer thin film structures
2019 ◽
Vol 222
◽
pp. 152-161
◽
Keyword(s):
2020 ◽
Vol 1559
◽
pp. 012067
2016 ◽
Vol 686
◽
pp. 235-244
◽
Keyword(s):
1996 ◽
Vol 31
(12)
◽
pp. 1449-1461
◽
2017 ◽
Vol 10
(4)
◽
pp. 507-512
◽
2005 ◽
Vol 44
(No. 39)
◽
pp. L1225-L1227
◽
2004 ◽
Vol 30
(7)
◽
pp. 1517-1520
◽
2008 ◽
Vol 62
(10-11)
◽
pp. 1613-1616
◽
Keyword(s):