Effects of UV-ozone treatment on radio-frequency magnetron sputtered ZnO thin films

2011 ◽  
Vol 520 (1) ◽  
pp. 569-573 ◽  
Author(s):  
W.M. Tang ◽  
M.T. Greiner ◽  
Z.H. Lu ◽  
W.T. Ng ◽  
H.G. Nam
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Ozone Treatment ◽  
Uv Ozone

Bonding and stoichiometry in low-energy radio frequency magnetron sputtered ZnO thin films on flexible substrate

Vacuum ◽  
2021 ◽  
Vol 183 ◽  
pp. 109869
Author(s):  
Chukwudi E. Iheomamere ◽  
Corey L. Arnold ◽  
Urmilaben P. Rathod ◽  
Khalil D. Omotosho ◽  
Andrey A. Voevodin ◽  
...  
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Flexible Substrate ◽  
Radio Frequency Magnetron ◽  
Low Energy ◽  
Zno Thin Films

Role of the radio frequency magnetron sputtered seed layer properties on ultrasonic spray pyrolyzed ZnO thin films

2017 ◽  
Vol 642 ◽  
pp. 163-168 ◽  
Author(s):  
Murat Tomakin ◽  
Zuhal Onuk ◽  
Nopporn Rujisamphan ◽  
Syed Ismat Shah
Keyword(s):  
Thin Films ◽  
Radio Frequency ◽  
Seed Layer ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Ultrasonic Spray

Tailoring the Surface Functionalities of Radio Frequency Magnetron-Sputtered ZnO Thin Films by Ar/NH3 Gas Mixture Surface-Wave Plasmas

Langmuir ◽  
2018 ◽  
Vol 34 (38) ◽  
pp. 11253-11263 ◽  
Author(s):  
Mihai Alexandru Ciolan ◽  
Iuliana Motrescu ◽  
Kuniaki Sugiura ◽  
Dumitru Luca ◽  
Masaaki Nagatsu
Keyword(s):  
Thin Films ◽  
Surface Wave ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Zno Thin Films ◽  
Gas Mixture
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