Effect of annealing treatment on structural, electrical, and optical properties of Ga-doped ZnO thin films deposited by RF magnetron sputtering

2011 ◽  
Vol 520 (2) ◽  
pp. 703-707 ◽  
Author(s):  
F. Wu ◽  
L. Fang ◽  
Y.J. Pan ◽  
K. Zhou ◽  
H.B. Ruan ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Annealing Treatment ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Electrical And Optical Properties ◽  
Doped Zno

Properties of Al Doped ZnO Thin films by DC Reaction Magnetron Sputtering

2011 ◽  
Vol 306-307 ◽  
pp. 362-367
Author(s):  
Feng Lu ◽  
Yu Sun ◽  
Cheng Hai Xu
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Visible Region ◽  
Hexagonal Wurtzite Structure ◽  
Zno Thin Films ◽  
High Quality ◽  
Electrical And Optical Properties ◽  
Polycrystalline Hexagonal Wurtzite Structure ◽  
Doped Zno

The high quality ZAO thin films were successfully produced by DC reaction magnetron sputtering technology. The XRD，electrical and optical properties of films are particular investigated. The results show that ZAO films are polycrystalline hexagonal wurtzite structure，and Al2O3 crystal phase are not found. At the same time，the high quality ZAO films with the minimum resistivity of 4.5x10-4Ω•㎝, the transmittance in visible region above 80% and the reflectivity in IR region above 70% are gained.

Comparison of the optical properties of undoped and Ga-doped ZnO thin films deposited using RF magnetron sputtering at room temperature

2008 ◽  
Vol 281 (8) ◽  
pp. 2120-2125 ◽  
Author(s):  
Do-Hyun Kim ◽  
Hoonha Jeon ◽  
Geumchae Kim ◽  
Suejeong Hwangboe ◽  
Ved Prakash Verma ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Thin Films ◽  
Doped Zno
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