Deposition of amorphous hydrogenated carbon films on Si and PMMA by pulsed direct-current plasma CVD

2011 ◽  
Vol 519 (20) ◽  
pp. 6688-6692 ◽  
Author(s):  
Ta-Lun Sung ◽  
Yu-An Chao ◽  
Chung-Ming Liu ◽  
Kungen Teii ◽  
Shinriki Teii ◽  
...  
Keyword(s):  
Direct Current ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Direct Current Plasma ◽  
Pulsed Direct Current ◽  
Amorphous Hydrogenated Carbon

Optical Characterization and Modeling of Amorphous Hydrogenated Carbon Films

1994 ◽  
Vol 349 ◽  
Author(s):  
William A. McGahan ◽  
John A. Woollam
Keyword(s):  
Optical Constants ◽  
Optical Characterization ◽  
Industrial Applications ◽  
Carbon Films ◽  
Plasma Cvd ◽  
Complete Structure ◽  
Glass Substrates ◽  
General Energy ◽  
Transmission Measurements ◽  
Amorphous Hydrogenated Carbon

ABSTRACTAmorphous hydrogenated carbon (a-C:H) thin films are of great importance in a number of industrial applications due to their hardness, chemical stability, and optical transparency. In many applications, the thickness of the a-C:H film and/or its optical properties are critical for the performance of the complete structure, and, as a result, a means of measuring these quantities is important. In this work we review the use of spectroscopic ellipsometry and transmission measurements for the estimation of the thickness and optical constants of thin a-C:H films. Spectra are shown for films exhibiting Tauc effective bandgaps ranging from 0 - 2.3 eV. The films were prepared by magnetron sputtering and plasma CVD on both silicon and glass substrates. The general energy dependence of the a-C:H optical constants is discussed in terms of the absorption processes which occur in the film.

scholarly journals The production mechanisms of OH radicals in a pulsed direct current plasma jet

2014 ◽  
Vol 21 (9) ◽  
pp. 093513 ◽  
Author(s):  
X. Y. Liu ◽  
X. K. Pei ◽  
K. Ostrikov ◽  
X. P. Lu ◽  
D. W. Liu
Keyword(s):  
Direct Current ◽  
Plasma Jet ◽  
Oh Radicals ◽  
Direct Current Plasma ◽  
Pulsed Direct Current ◽  
Production Mechanisms

scholarly journals The effect of applied electric field on pulsed radio frequency and pulsed direct current plasma jet array

2012 ◽  
Vol 19 (6) ◽  
pp. 063505 ◽  
Author(s):  
J. T. Hu ◽  
X. Y. Liu ◽  
J. H. Liu ◽  
Z. L. Xiong ◽  
D. W. Liu ◽  
...  
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Direct Current ◽  
Applied Electric Field ◽  
Plasma Jet ◽  
Direct Current Plasma ◽  
Pulsed Direct Current ◽  
Jet Array

Photoconductivity of amorphous hydrogenated carbon films prepared by plasma CVD of acetylene

Vacuum ◽  
1996 ◽  
Vol 47 (9) ◽  
pp. 1047-1051 ◽  
Author(s):  
M Basu ◽  
AB Maity ◽  
B Maiti ◽  
S Chaudhuri ◽  
AK Pal
Keyword(s):  
Carbon Films ◽  
Plasma Cvd ◽  
Amorphous Hydrogenated Carbon

scholarly journals Fluorination of rubber surface with direct current plasma CVD.

1993 ◽  
Vol 66 (2) ◽  
pp. 102-110 ◽  
Author(s):  
Sei-ichi YOKOI ◽  
Motoi KANZAKI ◽  
Kei KIKUCHI ◽  
Hideto IDEUE ◽  
Mina ICHIKAWA ◽  
...  
Keyword(s):  
Direct Current ◽  
Plasma Cvd ◽  
Direct Current Plasma ◽  
Rubber Surface
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