Aluminum doped silicon carbide thin films prepared by hot-wire CVD: Investigation of defects with electron spin resonance
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Hot Wire
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2010 ◽
Vol 207
(3)
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pp. 570-573
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1977 ◽
Vol 43
(1)
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pp. 114-117
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1993 ◽
Vol 48
(20)
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pp. 15144-15147
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