Improving the conductance of ZnO thin film doping with Ti by using a cathodic vacuum arc deposition process

2011 ◽  
Vol 519 (15) ◽  
pp. 5103-5105 ◽  
Author(s):  
Chun-Sen Wu ◽  
Bor-Tsuen Lin ◽  
Ming-Der Jean
Keyword(s):  
Thin Film ◽  
Deposition Process ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Filtered cathodic vacuum arc deposition of thin film copper

2001 ◽  
Vol 398-399 ◽  
pp. 539-543 ◽  
Author(s):  
S.P Lau ◽  
Y.H Cheng ◽  
J.R Shi ◽  
P Cao ◽  
B.K Tay ◽  
...  
Keyword(s):  
Thin Film ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

scholarly journals On the properties of TiN films prepared by vacuum arc deposition process.

Shinku ◽  
1987 ◽  
Vol 30 (10) ◽  
pp. 786-792 ◽  
Author(s):  
Koji OKAMOTO ◽  
Eiji KAMIJO
Keyword(s):  
Deposition Process ◽  
Vacuum Arc ◽  
Tin Films ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Influence of Bias Voltage on the Structural Properties and Adhesive Performance of ZnO Thin Films Deposited by Cathodic Vacuum Arc Deposition on Polyimide Foil Substrates

2010 ◽  
Vol 160-162 ◽  
pp. 194-199 ◽  
Author(s):  
Chang Ji Hu ◽  
Zhen Hui He
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Interfacial Shear Strength ◽  
Interfacial Shear ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Vacuum Arc Deposition ◽  
Polyimide Foil ◽  
Arc Deposition

ZnO thin films were deposited on polyimide foil substrates using cathodic vacuum arc deposition technique. X-ray diffraction was used to investigate the influence of bias voltage on the structure of ZnO thin films. The results show that all the samples have (002) preferred orientation. The internal stress of the films is compressive stress which increases with the bias voltage. Fragmentation test shows that the intrinsic interfacial shear strength of ZnO thin film without bias voltage is slightly lower than the shear yield strength of polyimide substrate; the intrinsic interfacial shear strength of ZnO thin film increases with the bias voltage from -50V to -200V, which indicates that bias voltage is beneficial to the enhancement of the adhesion between ZnO films and polyimide substrates. Further increase of the bias voltage to -300V leads to surface damage of the polyimide substrates.

Effect of substrate bias on AlN thin film preparation in shielded reactive vacuum arc deposition

2001 ◽  
Vol 386 (2) ◽  
pp. 276-280 ◽  
Author(s):  
Hirofumi Takikawa ◽  
Keisaku Kimura ◽  
Ryuichi Miyano ◽  
Tateki Sakakibara ◽  
Avi Bendavid ◽  
...  
Keyword(s):  
Thin Film ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Thin Film Preparation ◽  
Vacuum Arc Deposition ◽  
Film Preparation ◽  
Arc Deposition

Nano-Scale Multi-Layered Coatings for Cutting Tools Generated Using Assisted Filtered Cathodic-Vacuum-Arc Deposition (AFCVAD)

2013 ◽  
Vol 325-326 ◽  
pp. 1454-1459 ◽  
Author(s):  
A.A. Vereschaka ◽  
A.S. Vereschaka ◽  
S.N. Grigoriev ◽  
D.V. Sladkov
Keyword(s):  
High Efficiency ◽  
Cutting Tools ◽  
Deposition Process ◽  
High Energy ◽  
Vacuum Arc ◽  
Properties Of Coatings ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Carbide Inserts ◽  
Arc Deposition

The subject of this study were nano-nanoscale multilayer coatings formed using the process of filtered cathodic vacuum arc deposition in assisting high-energy ions of chromium. We used a special emitter (implantor) to generate chromium ions with high energy. Such key parameters of coatings as composition, structure, a thickness, hardness, adhesion in relation to a substrate obtained at various energy of chrome ions have been studied. It is establish the positive change of key properties of coating deposited on carbide inserts WC/CrC/Co, WC / (Co-Re), TiC/TaC/Co at assisted impact of ions Cr at ion acceleration voltage within the range of 10-40 kV. The results of measurement of parameters of coatings with use nanoindentometer are consistent with the X-ray analysis of the stresses in the coating (XSA study). The mechanisms of the effect of modified properties of coatings formed in assisting the filtered cathodic vacuum arc deposition on the properties of the carbide inserts in cutting structural steels and hard-to-cut nickel alloys have confirmed the high efficiency of the deposition process developed coatings and coating compositions.

Filtered cathodic vacuum arc deposition of copper thin film

2000 ◽  
Vol 36 (14) ◽  
pp. 1205 ◽  
Author(s):  
J.R. Shi ◽  
S.P. Lau ◽  
Z. Sun ◽  
X. Shi ◽  
B.K. Tay ◽  
...  
Keyword(s):  
Thin Film ◽  
Vacuum Arc ◽  
Copper Thin Film ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

scholarly journals Properties of AlN Film Formed by Vacuum Arc Deposition Process

1991 ◽  
Vol 111 (12) ◽  
pp. 1042-1046
Author(s):  
Hirofumi Takikawa ◽  
Tadashi Ogiriyama ◽  
Tateki Sakakibara
Keyword(s):  
Deposition Process ◽  
Vacuum Arc ◽  
Aln Film ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Annealing effect of thermal spike in MgO thin film prepared by cathodic vacuum arc deposition

2013 ◽  
Vol 143 (1) ◽  
pp. 209-212 ◽  
Author(s):  
Daoyun Zhu ◽  
Shoubai Zhao ◽  
Changxi Zheng ◽  
Dihu Chen ◽  
Zhenhui He
Keyword(s):  
Thin Film ◽  
Annealing Effect ◽  
Vacuum Arc ◽  
Thermal Spike ◽  
Vacuum Arc Deposition ◽  
Arc Deposition
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