Molecular dynamics simulation analyses on injection angle dependence of SiO2 sputtering yields by fluorocarbon beams

2007 ◽  
Vol 515 (12) ◽  
pp. 4883-4886 ◽  
Author(s):  
Tomohito Kawase ◽  
Satoshi Hamaguchi
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Dynamics Simulation ◽  
Injection Angle ◽  
Angle Dependence ◽  
Sputtering Yields

scholarly journals Распыление вольфрама ионами бериллия и неона

2020 ◽  
Vol 46 (24) ◽  
pp. 19
Author(s):  
Д.С. Мелузова ◽  
П.Ю. Бабенко ◽  
А.Н. Зиновьев ◽  
А.П. Шергин
Keyword(s):  
Experimental Data ◽  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Ion Bombardment ◽  
Dynamics Simulation ◽  
Tokamak Plasma ◽  
Universal Behavior ◽  
Sputtering Yields ◽  
Good Agreement ◽  
Near Threshold

Sputtering yields for tungsten under Be and Ne ion bombardment as well as angular dependencies of the sputtering yields were calculated using molecular dynamics simulation. The results for Ne are in good agreement with experimental data. The obtained results for Be-W sputtering are needed to calculate the impurity influx into the plasma when the divertor material - tungsten - is bombarded with Be ions in ITER tokamak plasma. A model that explains the universal behavior of near-threshold sputtering yields for light ion-induced sputtering of tungsten was proposed.

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