Wafer scale lead zirconate titanate film preparation by sol–gel method using stress balance layer

Jian Lu; Takeshi Kobayashi;  Yi Zhang; Ryutaro Maeda; Takashi Mihara

doi:10.1016/j.tsf.2006.04.016

Wafer scale lead zirconate titanate film preparation by sol–gel method using stress balance layer

Thin Solid Films ◽

10.1016/j.tsf.2006.04.016 ◽

2006 ◽

Vol 515 (4) ◽

pp. 1506-1510 ◽

Cited By ~ 26

Author(s):

Jian Lu ◽

Takeshi Kobayashi ◽

Yi Zhang ◽

Ryutaro Maeda ◽

Takashi Mihara

Keyword(s):

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Wafer Scale ◽

Zirconate Titanate ◽

Film Preparation

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Lead zirconate titanate thick films by sol-gel method for piezoelectric applications

Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002. ◽

10.1109/isaf.2002.1195969 ◽

2003 ◽

Author(s):

Y. Ohya ◽

T. Tamakoshi ◽

T. Ban ◽

Y. Takahashi

Keyword(s):

Lead Zirconate Titanate ◽

Thick Films ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Microstructure and electrical properties of lead zirconate titanate thin films deposited by sol-gel method on La0.7Sr0.3MnO3/SiO2/Si substrate

Journal of Sol-Gel Science and Technology ◽

10.1007/s10971-007-0762-4 ◽

2007 ◽

Vol 42 (3) ◽

pp. 375-379 ◽

Cited By ~ 8

Author(s):

Zhan Jie Wang ◽

Hirokazu Usuki ◽

Toshihide Kumagai ◽

Hiroyuki Kokawa

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Si Substrate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Preparation and Characterization of Lead Zirconate Titanate Heterolayered Thin Films on Pt/Ti/SiO2/Si Substrate by Sol–Gel Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.38.217 ◽

1999 ◽

Vol 38 (Part 1, No. 1A) ◽

pp. 217-218 ◽

Cited By ~ 2

Author(s):

Sung-Gap Lee ◽

Kwang-Taek Shim ◽

Young-Hie Lee

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Si Substrate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Synthesis of ferroelectric lead zirconate titanate, Pb [Zr0.52Ti0.48]O3 (PZT) thin film on gold substrate by sol-gel method

2015 International Conference on Electrical Engineering and Information Communication Technology (ICEEICT) ◽

10.1109/iceeict.2015.7307447 ◽

2015 ◽

Author(s):

M. F. Rahman ◽

L. Miglioli

Keyword(s):

Thin Film ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Gold Substrate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate ◽

Pzt Thin Film

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Synthesis and Optical Characterization of Lead Zirconate Titanate (52/48) Powders by Sol–Gel Method

Advanced Science Engineering and Medicine ◽

10.1166/asem.2013.1280 ◽

2013 ◽

Vol 5 (5) ◽

pp. 496-499 ◽

Cited By ~ 3

Author(s):

M. Prabu ◽

I. B. Shameem Banu ◽

S. Gobalakrishnan ◽

Murthy Chavali ◽

S. Umapathy

Keyword(s):

Lead Zirconate Titanate ◽

Sol Gel ◽

Optical Characterization ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Electrical properties of lead zirconate titanate thick films prepared by hybrid sol–gel method with multiple infiltration steps

Materials Chemistry and Physics ◽

10.1016/j.matchemphys.2006.05.003 ◽

2007 ◽

Vol 101 (2-3) ◽

pp. 280-284 ◽

Cited By ~ 10

Author(s):

J. Pérez ◽

N.P. Vyshatko ◽

P.M. Vilarinho ◽

A.L. Kholkin

Keyword(s):

Electrical Properties ◽

Lead Zirconate Titanate ◽

Thick Films ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Preparation of Lead Zirconate Titanate Thin Films Derived by Hybrid Processing: Sol-Gel Method and Laser Ablation

Journal of the American Ceramic Society ◽

10.1111/j.1151-2916.2002.tb00592.x ◽

2004 ◽

Vol 85 (12) ◽

pp. 3108-3110 ◽

Cited By ~ 16

Author(s):

Zhan Jie Wang ◽

Isao Karibe ◽

Ryutaro Maeda ◽

Hiroyuki Kokawa

Keyword(s):

Thin Films ◽

Laser Ablation ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Lanthanum doped lead zirconate titanate stannate antiferroelectric thin films from acetic acid-based sol–gel method

Materials Letters ◽

10.1016/s0167-577x(97)00165-1 ◽

1998 ◽

Vol 34 (3-6) ◽

pp. 157-160 ◽

Cited By ~ 20

Author(s):

Baomin Xu ◽

Neelesh G. Pai ◽

L.Eric Cross

Keyword(s):

Thin Films ◽

Acetic Acid ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate

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Electro-Optic Properties of Lanthanum-Modified Lead Zirconate Titanate Thin Films Epitaxially Grown by the Advanced Sol–Gel Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.l244 ◽

2007 ◽

Vol 46 (No. 11) ◽

pp. L244-L246 ◽

Cited By ~ 32

Author(s):

Kiyoshi Uchiyama ◽

Atsushi Kasamatsu ◽

Yohei Otani ◽

Tadashi Shiosaki

Keyword(s):

Thin Films ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate ◽

Electro Optic

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Low temperature crystallization of lead zirconate titanate thin films by a sol-gel method

Journal of Applied Physics ◽

10.1063/1.369362 ◽

1999 ◽

Vol 85 (10) ◽

pp. 7355-7361 ◽

Cited By ~ 133

Author(s):

Z. Huang ◽

Q. Zhang ◽

R. W. Whatmore

Keyword(s):

Thin Films ◽

Low Temperature ◽

Lead Zirconate Titanate ◽

Sol Gel ◽

Lead Zirconate ◽

Gel Method ◽

Sol Gel Method ◽

Zirconate Titanate ◽

Low Temperature Crystallization ◽

Temperature Crystallization

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