Radio Frequency sputtered Si1−xGex and Si1−xGexOy thin films for uncooled infrared detectors

Mukti M. Rana; Donald P. Butler

doi:10.1016/j.tsf.2006.02.088

Radio Frequency sputtered Si1−xGex and Si1−xGexOy thin films for uncooled infrared detectors

Thin Solid Films ◽

10.1016/j.tsf.2006.02.088 ◽

2006 ◽

Vol 514 (1-2) ◽

pp. 355-360 ◽

Cited By ~ 17

Author(s):

Mukti M. Rana ◽

Donald P. Butler

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Infrared Detectors ◽

Uncooled Infrared Detectors

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Low temperature deposited nano-structured vanadium oxide thin films for uncooled infrared detectors

2008 2nd IEEE International Nanoelectronics Conference ◽

10.1109/inec.2008.4585634 ◽

2008 ◽

Author(s):

Guike Li ◽

Xiaodong Wang ◽

Jiran Liang ◽

An Ji ◽

Ming Hu ◽

...

Keyword(s):

Thin Films ◽

Low Temperature ◽

Vanadium Oxide ◽

Infrared Detectors ◽

Oxide Thin Films ◽

Uncooled Infrared Detectors ◽

Vanadium Oxide Thin Films

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(Mn, Sb)-doped PZT thin films with (La, Sr)CoO3 electrodes for uncooled infrared detectors

10.1117/12.391719 ◽

2000 ◽

Cited By ~ 2

Author(s):

Yuqing Xu ◽

Yanqi Wang ◽

Naijuan Wu ◽

Alex Ignatiev ◽

Xuemin Chen

Keyword(s):

Thin Films ◽

Infrared Detectors ◽

Pzt Thin Films ◽

Uncooled Infrared Detectors

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Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

Journal of Electronic Materials ◽

10.1007/s11664-005-0055-z ◽

2005 ◽

Vol 34 (5) ◽

pp. 484-490 ◽

Cited By ~ 12

Author(s):

V. R. Mehta ◽

S. Shet ◽

N. M. Ravindra ◽

A. T. Fiory ◽

M. P. Lepselter

Keyword(s):

Thin Films ◽

Infrared Detectors ◽

Uncooled Infrared Detectors

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Processing Issues in Pulse DC Sputtering of Vanadium Oxide Thin Films for Uncooled Infrared Detectors

Ceramic Transactions Series - Advances in Electroceramic Materials II ◽

10.1002/9780470930915.ch16 ◽

2010 ◽

pp. 177-185 ◽

Cited By ~ 3

Author(s):

S. S. N. Bharadwaja ◽

C. Venkatasubramanyam ◽

N. Fieldhouse ◽

B. Gauntt ◽

Myung Yoon Lee ◽

...

Keyword(s):

Thin Films ◽

Vanadium Oxide ◽

Infrared Detectors ◽

Oxide Thin Films ◽

Dc Sputtering ◽

Uncooled Infrared Detectors ◽

Vanadium Oxide Thin Films

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Pulsed laser deposited vanadium oxide thin films for uncooled infrared detectors

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(03)00233-4 ◽

2003 ◽

Vol 107 (1) ◽

pp. 62-67 ◽

Cited By ~ 50

Author(s):

R.T. Rajendra Kumar ◽

B. Karunagaran ◽

D. Mangalaraj ◽

Sa.K. Narayandass ◽

P. Manoravi ◽

...

Keyword(s):

Thin Films ◽

Vanadium Oxide ◽

Infrared Detectors ◽

Pulsed Laser ◽

Oxide Thin Films ◽

Uncooled Infrared Detectors ◽

Vanadium Oxide Thin Films

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Room temperature deposited vanadium oxide thin films for uncooled infrared detectors

Materials Research Bulletin ◽

10.1016/s0025-5408(03)00118-1 ◽

2003 ◽

Vol 38 (7) ◽

pp. 1235-1240 ◽

Cited By ~ 34

Author(s):

R.T.Rajendra Kumar ◽

B. Karunagaran ◽

D. Mangalaraj ◽

Sa.K. Narayandass ◽

P. Manoravi ◽

...

Keyword(s):

Thin Films ◽

Vanadium Oxide ◽

Infrared Detectors ◽

Room Temperature ◽

Oxide Thin Films ◽

Uncooled Infrared Detectors ◽

Vanadium Oxide Thin Films

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Optical properties and laser-induced breakdown spectroscopy analysis of Al- or Co-doped CuO thin films prepared on glass by radio-frequency magnetron sputtering

Thin Solid Films ◽

10.1016/j.tsf.2021.138572 ◽

2021 ◽

Vol 722 ◽

pp. 138572

Author(s):

Jiasen Wu ◽

Qing Gao ◽

Gongxiang Wei ◽

Junshan Xiu ◽

Zhao Li ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Laser Induced Breakdown Spectroscopy ◽

Radio Frequency Magnetron Sputtering ◽

Spectroscopy Analysis ◽

Breakdown Spectroscopy ◽

Laser Induced Breakdown ◽

Co Doped

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Structural and optical properties of CdSe0.2Te0.8 thin films prepared by radio frequency magnetron sputtering

Materials Letters ◽

10.1016/j.matlet.2021.129320 ◽

2021 ◽

Vol 288 ◽

pp. 129320

Author(s):

Guangqiang He ◽

Zhihui Xiong ◽

Hui Yang ◽

Ming Yang ◽

Zhixi Li ◽

...

Keyword(s):

Thin Films ◽

Optical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Structural And Optical Properties

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Fabrication of Mg3Sb2 thin films via radio-frequency magnetron sputtering and analysis of the corresponding electrical properties

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-021-06468-3 ◽

2021 ◽

Author(s):

Jun-ichi Tani ◽

Hiromichi Ishikawa

Keyword(s):

Thin Films ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Tunable optoelectronic properties of radio frequency sputter-deposited Sb2Se3 thin films: Role of growth angle and thickness

Solar Energy ◽

10.1016/j.solener.2019.11.016 ◽

2019 ◽

Vol 194 ◽

pp. 716-723

Author(s):

Alapan Dutta ◽

Ranveer Singh ◽

Sanjeev Kumar Srivastava ◽

Tapobrata Som

Keyword(s):

Thin Films ◽

Radio Frequency ◽

Optoelectronic Properties ◽

Growth Angle ◽

Sputter Deposited

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