Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis

F.L. Martínez; M. Toledano; E. San Andrés; I. Mártil; G. González-Díaz; W. Bohne; J. Röhrich; E. Strub

doi:10.1016/j.tsf.2005.12.239

Compositional analysis of polycrystalline hafnium oxide thin films by heavy-ion elastic recoil detection analysis

Thin Solid Films ◽

10.1016/j.tsf.2005.12.239 ◽

2006 ◽

Vol 515 (2) ◽

pp. 695-699 ◽

Cited By ~ 3

Author(s):

F.L. Martínez ◽

M. Toledano ◽

E. San Andrés ◽

I. Mártil ◽

G. González-Díaz ◽

...

Keyword(s):

Thin Films ◽

Hafnium Oxide ◽

Compositional Analysis ◽

Heavy Ion ◽

Elastic Recoil ◽

Oxide Thin Films ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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The Paths of Plurally Scattered Ions in Heavy Ion Elastic Recoil Detection Analysis

10.1063/1.1619741 ◽

2003 ◽

Cited By ~ 2

Author(s):

R. D. Franich

Keyword(s):

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Elastic recoil detection analysis with heavy ion beams

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(97)00872-0 ◽

1998 ◽

Vol 136-138 ◽

pp. 594-602 ◽

Cited By ~ 15

Author(s):

J.A. Davies ◽

J.S. Forster ◽

S.R. Walker

Keyword(s):

Heavy Ion ◽

Ion Beams ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Time of flight assistedΔE-Emethod for enhanced isotope separation capabilities in heavy ion elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2017.02.056 ◽

2017 ◽

Vol 406 ◽

pp. 10-14 ◽

Cited By ~ 1

Author(s):

S. Eschbaumer ◽

A. Bergmaier ◽

D. Seiler ◽

G. Dollinger

Keyword(s):

Isotope Separation ◽

Time Of Flight ◽

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Iodine Induced Damage in Semiconductor Materials During Heavy Ion Recoil Elastic Recoil Detection Analysis

Ion Beam Modification of Materials ◽

10.1016/b978-0-444-82334-2.50165-9 ◽

1996 ◽

pp. 849-852

Author(s):

Scott R. WALKER ◽

Peter N. JOHNSTON ◽

Ian F. BUBB ◽

Warren B. STANNARD ◽

David N. JAMIESON ◽

...

Keyword(s):

Heavy Ion ◽

Semiconductor Materials ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Heavy ion elastic recoil detection analysis set up for electronic sputtering studies

Radiation Effects and Defects in Solids ◽

10.1080/10420150600668564 ◽

2006 ◽

Vol 161 (4) ◽

pp. 247-255 ◽

Cited By ~ 4

Author(s):

S. Ghosh ◽

D. K. Avasthi ◽

A. Tripathi ◽

D. Kabiraj ◽

P. Sugathan ◽

...

Keyword(s):

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Set Up

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Radiation damage during heavy ion elastic recoil detection analysis of insulating materials

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(97)00886-0 ◽

1998 ◽

Vol 136-138 ◽

pp. 707-712 ◽

Cited By ~ 24

Author(s):

S.R. Walker ◽

J.A. Davies ◽

J.S. Forster ◽

S.G. Wallace ◽

A.C. Kockelkoren

Keyword(s):

Radiation Damage ◽

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Insulating Materials ◽

Elastic Recoil Detection ◽

Detection Analysis

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Quantitative analysis of hydrogen in thin films using Time-of-Flight Elastic Recoil Detection Analysis

Thin Solid Films ◽

10.1016/j.tsf.2009.07.196 ◽

2010 ◽

Vol 518 (10) ◽

pp. 2617-2622 ◽

Cited By ~ 12

Author(s):

Zdravko Siketić ◽

Iva Bogdanović Radović ◽

Milko Jakšić

Keyword(s):

Thin Films ◽

Quantitative Analysis ◽

Time Of Flight ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2006.03.111 ◽

2006 ◽

Vol 249 (1-2) ◽

pp. 189-192 ◽

Cited By ~ 6

Author(s):

S. Giangrandi ◽

B. Brijs ◽

T. Sajavaara ◽

H. Bender ◽

F. Iacopi ◽

...

Keyword(s):

Heavy Ion ◽

Low Energy ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis ◽

Low K

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Heavy ion elastic recoil detection analysis of silicon-rich silica films used for the synthesis of silicon nanocrystals

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(01)01008-4 ◽

2001 ◽

Vol 0 (0) ◽

pp. 0

Author(s):

T Weijers

Keyword(s):

Silicon Nanocrystals ◽

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Silica Films ◽

Elastic Recoil Detection ◽

Detection Analysis

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Implementation of heavy-ion elastic recoil detection analysis at JANNUS-Saclay for quantitative helium depth profiling

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2015.07.040 ◽

2015 ◽

Vol 360 ◽

pp. 9-15 ◽

Cited By ~ 3

Author(s):

T. Loussouarn ◽

L. Beck ◽

P. Trocellier ◽

D. Brimbal ◽

F. Leprêtre ◽

...

Keyword(s):

Depth Profiling ◽

Heavy Ion ◽

Elastic Recoil ◽

Elastic Recoil Detection Analysis ◽

Elastic Recoil Detection ◽

Detection Analysis

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