The characteristics of aluminium-doped zinc oxide films prepared by pulsed magnetron sputtering from powder targets

2004 ◽  
Vol 447-448 ◽  
pp. 33-39 ◽  
Author(s):  
Y. Zhou ◽  
P.J. Kelly ◽  
A. Postill ◽  
O. Abu-Zeid ◽  
A.A. Alnajjar
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Zinc Oxide Films ◽  
Pulsed Magnetron

Influence of Thermal Annealing on Microstructures of Zinc Oxide Films Deposited by RF Magnetron Sputtering

2007 ◽  
Vol 46 (6A) ◽  
pp. 3319-3323 ◽  
Author(s):  
Takahiro Hiramatsu ◽  
Mamoru Furuta ◽  
Hiroshi Furuta ◽  
Tokiyoshi Matsuda ◽  
Takashi Hirao
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Thermal Annealing ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Zinc Oxide Films

Structural studies of zinc oxide films grown by RF magnetron sputtering

2005 ◽  
Vol 148 (1) ◽  
pp. 37-41 ◽  
Author(s):  
I. Sayago ◽  
M. Aleixandre ◽  
A. Martínez ◽  
M.J. Fernández ◽  
J.P. Santos ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Oxide Films ◽  
Rf Magnetron Sputtering ◽  
Structural Studies ◽  
Zinc Oxide Films

Low content indium-doped zinc oxide films with tunable work function fabricated through magnetron sputtering

2010 ◽  
Vol 25 (4) ◽  
pp. 045008 ◽  
Author(s):  
Changgang Huang ◽  
Meili Wang ◽  
Zhonghua Deng ◽  
Yongge Cao ◽  
Quanlin Liu ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Work Function ◽  
Oxide Films ◽  
Zinc Oxide Films
Sign in / Sign up

Export Citation Format

Share Document