Low temperature Si doped ZnO thin films for transparent conducting oxides

2011 ◽  
Vol 95 (8) ◽  
pp. 2357-2362 ◽  
Author(s):  
J. Clatot ◽  
G. Campet ◽  
A. Zeinert ◽  
C. Labrugère ◽  
M. Nistor ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Transparent Conducting Oxides ◽  
Zno Thin Films ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
Si Doped ◽  
Doped Zno

scholarly journals Al-, Ga-, and In-doped ZnO thin films via aerosol assisted CVD for use as transparent conducting oxides

2016 ◽  
Vol 213 (5) ◽  
pp. 1346-1352 ◽  
Author(s):  
Dominic B. Potter ◽  
Davinder S. Bhachu ◽  
Michael J. Powell ◽  
Jawwad A. Darr ◽  
Ivan P. Parkin ◽  
...  
Keyword(s):  
Thin Films ◽  
Transparent Conducting Oxides ◽  
Zno Thin Films ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
Doped Zno

scholarly journals Transparent conducting oxide thin films of Si-doped ZnO prepared by aerosol assisted CVD

RSC Advances ◽  
2017 ◽  
Vol 7 (18) ◽  
pp. 10806-10814 ◽  
Author(s):  
Dominic B. Potter ◽  
Michael J. Powell ◽  
Jawwad A. Darr ◽  
Ivan P. Parkin ◽  
Claire J. Carmalt
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Transparent Conducting Oxide ◽  
Chemical Vapour ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Si Doped ◽  
Doped Zno ◽  
First Time

For the first time, aerosol assisted chemical vapour deposition (AACVD) was used to deposit Si-doped ZnO thin films on glass.

Low-temperature deposition of transparent conducting Mn-W co-doped ZnO thin films

2010 ◽  
Vol 31 (8) ◽  
pp. 083005 ◽  
Author(s):  
Zhang Huafu ◽  
Liu Hanfa ◽  
Lei Chengxin ◽  
Zhou Aiping ◽  
Yuan Changkun
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Zno Thin Films ◽  
Transparent Conducting ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Doped Zno ◽  
Co Doped

scholarly journals Si-doped zinc oxide transparent conducting oxides; nanoparticle optimisation, scale-up and thin film deposition

2017 ◽  
Vol 5 (34) ◽  
pp. 8796-8801 ◽  
Author(s):  
D. P. Howard ◽  
P. Marchand ◽  
C. J. Carmalt ◽  
I. P. Parkin ◽  
J. A. Darr
Keyword(s):  
Thin Film ◽  
Spin Coating ◽  
Scale Up ◽  
Transparent Conducting Oxides ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Conducting Oxides ◽  
Transparent Conducting ◽  
Si Doped ◽  
Doped Zno

Si-doped ZnO was made by a continuous hydrothermal method and deposited by spin coating; ρ = 2.4 × 10−3 Ω cm, Tvis > 80%.

Influence of dopant nature on the TCO properties of ZnO:M (M=Al, Ga, Sn, Si, Ge) thin films

2011 ◽  
Vol 1328 ◽  
Author(s):  
J. Clatot ◽  
G. Campet ◽  
M. Jean ◽  
M. Nistor ◽  
A. Rougier
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Electronic Properties ◽  
Transparent Conducting Oxides ◽  
Visible Region ◽  
Zno Thin Films ◽  
Conducting Oxides ◽  
Si Doping ◽  
Transparent Conducting ◽  
Cation Nature

ABSTRACTAiming at clarifying the opto-electronic properties of ZnO based n-type Transparent Conducting Oxides, TCOs, properties of ZnO thin films are studied as a function of cationic doping. In addition to commonly reported, Al and Ga trivalent dopant, similar performances are reported for Si doping. In the visible region, ZnO:Si (3 %) thin film exhibit a transmittance higher than 80 % for a resistivity as low as 8x10-4 Ω.cm when grown at 100 °C under 1.0 Pa oxygen pressure. The influence of tetravalent cations as dopant is also investigated through Sn and Ge additions. It shows that not only the oxidation state plays a role but also the cation nature. Indeed, ZnO:Sn thin films are insulating whereas the ZnO:Ge thin films are conductive with resistivity values higher than the ones of ZnO:Si thin films.

The electrical, elemental, optical, and surface properties of Si-doped ZnO thin films prepared by thermionic vacuum arc

2017 ◽  
Vol 4 (9) ◽  
pp. 096404 ◽  
Author(s):  
Reza Mohammadigharehbagh ◽  
Soner Özen ◽  
Hafizittin Hakan Yudar ◽  
Suat Pat ◽  
Şadan Korkmaz
Keyword(s):  
Thin Films ◽  
Surface Properties ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Si Doped ◽  
Doped Zno ◽  
Thermionic Vacuum Arc
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