CuInSe2 thin films deposited by UV laser ablation

2006 ◽  
Vol 90 (20) ◽  
pp. 3624-3632 ◽  
Author(s):  
A. Tverjanovich ◽  
E.N. Borisov ◽  
E.S. Vasilieva ◽  
O.V. Tolochko ◽  
I.E. Vahhi ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Uv Laser

Edge Isolation of Transparent Conductive Polymer (TCP) Thin Films on Flexible Substrates using UV Laser Ablation

2012 ◽  
Vol 12 (6) ◽  
pp. 4905-4910
Author(s):  
Wen-Tse Hsiao ◽  
Shih-Feng Tseng ◽  
Kuo-Cheng Huang ◽  
Donyau Chiang ◽  
Ming-Fei Chen
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Conductive Polymer ◽  
Flexible Substrates ◽  
Uv Laser

Characterization of UV laser ablation for microprocessing of a-Si:H thin films

2006 ◽  
Author(s):  
C. Molpeceres ◽  
S. Lauzurica ◽  
J. L. Ocaña ◽  
J. J. Gandía ◽  
L. Urbina ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Uv Laser

NbAl3/Al microlaminated thin films deposited by UV laser ablation

2001 ◽  
Vol 388 (1-2) ◽  
pp. 101-106 ◽  
Author(s):  
H.L. Chung ◽  
M.H. Jilavi ◽  
T.P. Duffey ◽  
M.A. Shannon ◽  
W.M. Kriven ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Uv Laser

Observations on the growth of YBa2Cu3O7-δ thin films on MgO by pulsed-laser ablation

1991 ◽  
Vol 49 ◽  
pp. 1068-1069
Author(s):  
M. Grant Norton ◽  
C. Barry Carter
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Laser Ablation ◽  
Substrate Surface ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Laser Ablation Process ◽  
Deposition Parameters

Pulsed-laser ablation has been widely used to produce high-quality thin films of YBa2Cu3O7-δ on a range of substrate materials. The nonequilibrium nature of the process allows congruent deposition of oxides with complex stoichiometrics. In the high power density regime produced by the UV excimer lasers the ablated species includes a mixture of neutral atoms, molecules and ions. All these species play an important role in thin-film deposition. However, changes in the deposition parameters have been shown to affect the microstructure of thin YBa2Cu3O7-δ films. The formation of metastable configurations is possible because at the low substrate temperatures used, only shortrange rearrangement on the substrate surface can occur. The parameters associated directly with the laser ablation process, those determining the nature of the process, e g. thermal or nonthermal volatilization, have been classified as ‘primary parameters'. Other parameters may also affect the microstructure of the thin film. In this paper, the effects of these ‘secondary parameters' on the microstructure of YBa2Cu3O7-δ films will be discussed. Examples of 'secondary parameters' include the substrate temperature and the oxygen partial pressure during deposition.

scholarly journals Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation

2020 ◽  
Vol 22 (4) ◽  
pp. 1901173
Author(s):  
Tuan‐Khoa Nguyen ◽  
Hoang-Phuong Phan ◽  
Karen M. Dowling ◽  
Ananth Saran Yalamarthy ◽  
Toan Dinh ◽  
...  
Keyword(s):  
Silicon Carbide ◽  
Laser Ablation ◽  
Uv Laser
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