Excimer-laser deinsulation of Parylene-C coated Utah electrode array tips

2012 ◽  
Vol 166-167 ◽  
pp. 777-786 ◽  
Author(s):  
Je-Min Yoo ◽  
Asha Sharma ◽  
Prashant Tathireddy ◽  
Loren W. Rieth ◽  
Florian Solzbacher ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Electrode Array ◽  
Parylene C ◽  
Utah Electrode Array

scholarly journals Excimer laser deinsulation of Parylene-C on iridium for use in an activated iridium oxide film-coated Utah electrode array

2013 ◽  
Vol 215 (1) ◽  
pp. 78-87 ◽  
Author(s):  
Je-Min Yoo ◽  
Sandeep Negi ◽  
Prashant Tathireddy ◽  
Florian Solzbacher ◽  
Jong-In Song ◽  
...  
Keyword(s):  
Oxide Film ◽  
Excimer Laser ◽  
Electrode Array ◽  
Iridium Oxide ◽  
Parylene C ◽  
Utah Electrode Array

Hybrid laser and reactive ion etching of Parylene-C for deinsulation of a Utah electrode array

2012 ◽  
Vol 22 (10) ◽  
pp. 105036 ◽  
Author(s):  
Je-Min Yoo ◽  
Jong-In Song ◽  
Prashant Tathireddy ◽  
Florian Solzbacher ◽  
Loren W Rieth
Keyword(s):  
Reactive Ion Etching ◽  
Electrode Array ◽  
Parylene C ◽  
Ion Etching ◽  
Utah Electrode Array

scholarly journals Self-aligned tip deinsulation of atomic layer deposited Al2O3and parylene C coated Utah electrode array based neural interfaces

2014 ◽  
Vol 24 (3) ◽  
pp. 035003 ◽  
Author(s):  
Xianzong Xie ◽  
Loren Rieth ◽  
Sandeep Negi ◽  
Rajmohan Bhandari ◽  
Ryan Caldwell ◽  
...  
Keyword(s):  
Electrode Array ◽  
Atomic Layer ◽  
Neural Interfaces ◽  
Parylene C ◽  
Utah Electrode Array

scholarly journals Long-term reliability of Al2O3and Parylene C bilayer encapsulated Utah electrode array based neural interfaces for chronic implantation

2014 ◽  
Vol 11 (2) ◽  
pp. 026016 ◽  
Author(s):  
Xianzong Xie ◽  
Loren Rieth ◽  
Layne Williams ◽  
Sandeep Negi ◽  
Rajmohan Bhandari ◽  
...  
Keyword(s):  
Electrode Array ◽  
Neural Interfaces ◽  
Parylene C ◽  
Utah Electrode Array

Atomic Layer Deposited Al2O3 and Parylene C Bi-layer Encapsulation for Utah Electrode Array Based Neural Interfaces

2014 ◽  
Vol 1621 ◽  
pp. 259-265
Author(s):  
Xianzong Xie ◽  
Loren W. Rieth ◽  
Rohit Sharma ◽  
Sandeep Negi ◽  
Rajmohan Bhandari ◽  
...  
Keyword(s):  
Electrode Array ◽  
Atomic Layer ◽  
Implantable Devices ◽  
Neural Interfaces ◽  
Parylene C ◽  
Soaking Time ◽  
Encapsulation Method ◽  
Rf Signal ◽  
Utah Electrode Array

ABSTRACTLong-term functionality and stability of neural interfaces with complex geometries is one of the major challenges for chronic clinic applications due to lack of effective encapsulation. We present an encapsulation method that combines atomic layer deposited Al2O3 and Parylene C for encapsulation of biomedical implantable devices, focusing on its application on Utah electrode array based neural interfaces. The alumina and Parylene C bi-layer encapsulated wired Utah electrode array showed relatively stable impedance during the 960 equivalent soaking days at 37 °C in phosphate buffered solution. For the bi-layer coated wireless neural interfaces, the power-up frequency was constantly ∼ 910 MHz and the RF signal strength was stably around -73 dBm during equivalent soaking time of 1044 days at 37 °C (still under soak testing).

System integration of the Utah electrode array using a biocompatible flip chip under bump metallization scheme

2007 ◽  
Author(s):  
Rajmohan Bhandari ◽  
Sandeep Negi ◽  
Loren Rieth ◽  
Michael Toepper ◽  
Sohee Kim ◽  
...  
Keyword(s):  
System Integration ◽  
Flip Chip ◽  
Electrode Array ◽  
Under Bump Metallization ◽  
Utah Electrode Array

scholarly journals Self-Limiting Electrospray Deposition on Polymer Templates

2020 ◽  
Author(s):  
Lin Lei ◽  
Arielle R. Gamboa ◽  
Christianna Kutznetsova ◽  
Sunshine Littlecreek ◽  
Jingren Wang ◽  
...  
Keyword(s):  
Electrode Array ◽  
Electrospray Deposition ◽  
Parylene C ◽  
Insulating Materials ◽  
Insulating Films ◽  
Varying Thickness ◽  
Charged Droplets ◽  
Polymer Templates ◽  
Conductive Substrates ◽  
Microhole Array

<p>Electrospray deposition (ESD) applies a high voltage to liquids flowing through narrow capillaries to produce monodisperse generations of droplets down to hundreds of nanometers in diameter, each carrying a small amount of the delivered solute. This deposition method has been combined with insulated stencil masks for fabricating micropatterns by spraying solutions containing nanoparticles, polymers, or biomaterials. To optimize the fabrication process for micro-coatings, a self-limiting electrospray deposition (SLED) method has recently been developed. Here, we combine SLED with a pre-existing patterned polymer film to study SLED’s fundamental behavior in a bilayer geometry. SLED has been observed when glassy insulating materials are sprayed onto conductive substrates, where a thickness-limited film forms as charge accumulates and repels the arrival of additional charged droplets. In this study, polystyrene (PS), Parylene C, and SU-8 thin films of varying thickness on silicon are utilized as insulated spraying substrates. Polyvinylpyrrolidone (PVP), a thermoplastic polymer is sprayed below its glass transition temperature (T<sub>g</sub>) to investigate the SLED behavior on the pre-deposited insulating films. Furthermore, to examine the effects of in-plane confinement on the spray, a microhole array patterned onto the PS thin film by laser dewetting was sprayed with dyed PVP in the SLED mode. This was then extended to an unmasked electrode array showing that masked SLED and laser dewetting could be used to target microscale regions of conventionally patterned electronics.</p>

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