A nitric oxide gas sensor based on Rayleigh surface acoustic wave resonator for room temperature operation

2011 ◽  
Vol 156 (2) ◽  
pp. 668-672 ◽  
Author(s):  
Shih-Han Wang ◽  
Shih-Hao Kuo ◽  
Chi-Yen Shen
Keyword(s):  
Nitric Oxide ◽  
Acoustic Wave ◽  
Gas Sensor ◽  
Surface Acoustic Wave ◽  
Room Temperature ◽  
Wave Resonator ◽  
Room Temperature Operation

Room Temperature Detection Properties of a Surface Acoustic Wave Gas Sensor with Cu2+/PANI/SnO2 Nanocomposite Thin Film to Nitric Oxide

2013 ◽  
Vol 312 ◽  
pp. 732-735 ◽  
Author(s):  
Chi Yen Shen ◽  
Hsiang Min Huang ◽  
Shih Han Wang ◽  
Yu Chen Chiu
Keyword(s):  
Thin Film ◽  
Nitric Oxide ◽  
Acoustic Wave ◽  
Frequency Shift ◽  
Gas Sensor ◽  
Surface Acoustic Wave ◽  
Room Temperature ◽  
Nanocomposite Thin Film ◽  
Temperature Detection

A Rayleigh surface acoustic wave (RSAW) resonator with Cu2+-PANI-SnO2 nanocomposite thin film is investigated as a gas sensor for detecting the presence of nitric oxide (NO) in air. The sensor developed in this work was sensitive to NO gas at room temperature. It is shown that the sensor had a frequency shift of 0.45 ppm when it was exposed to 12 ppb NO. This RSAW sensor also exhibited repeatability to the presence of NO gas. Especially, the presented sensor showed highly selectivity with NO gas to separate from NO2 and CO2 gases.

Investigation of Novel Surface Acoustic Wave (SAW) Gas Sensor Used in Sensor Network

PIERS Online ◽  
2008 ◽  
Vol 4 (3) ◽  
pp. 346-350
Author(s):  
Mitsutaka Hikita ◽  
Keiya Minami ◽  
Koki Takimoto ◽  
Yasushi Hiraizumi
Keyword(s):  
Acoustic Wave ◽  
Sensor Network ◽  
Gas Sensor ◽  
Surface Acoustic Wave

Surface acoustic wave resonator from thick MOVPE-grown layers of GaN(0001) on sapphire

2002 ◽  
Vol 743 ◽  
Author(s):  
Sverre V. Pettersen ◽  
Thomas Tybell ◽  
Arne Rønnekleiv ◽  
Stig Rooth ◽  
Veit Schwegler ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Electromechanical Coupling ◽  
Film Surface ◽  
Center Frequency ◽  
Electromechanical Coupling Coefficient ◽  
Nitride Film ◽  
Wave Resonator ◽  
Lift Off ◽  
Definition Of

ABSTRACTWe report on fabrication and measurement of a surface acoustic wave resonator prepared on ∼10m thick GaN(0001) films. The films were grown by metal-organic vapor phase epitaxy on a c-plane sapphire substrate. The surface morphology of the films were examined with scanning electron and atomic force microscopy. A metallic bilayer of Al/Ti was subsequently evaporated on the nitride film surface. Definition of the resonator interdigital transducers, designed for a wavelength of λ=7.76m, was accomplished with standard UV lithography and lift-off. S-parameter measurements showed a resonator center frequency f0=495MHz at room temperature, corresponding to a surface acoustic wave velocity of 3844m/s. The insertion loss at center frequency was measured at 8.2dB, and the loaded Q-factor was estimated at 2200. Finally, measurements of the resonator center frequency for temperatures in the range 25–155°C showed a temperature coefficient of -18ppm/°C. The intrinsic GaN SAW velocity and electromechanical coupling coefficient were estimated at νSAW=383 1m/s and K2=1.8±0.4·10−3.

Dual Transduction Surface Acoustic Wave Gas Sensor for VOC Discrimination

2018 ◽  
Vol 39 (12) ◽  
pp. 1920-1923 ◽  
Author(s):  
Feng Gao ◽  
Farid Boussaid ◽  
Weipeng Xuan ◽  
Chi-Ying Tsui ◽  
Amine Bermak
Keyword(s):  
Acoustic Wave ◽  
Gas Sensor ◽  
Surface Acoustic Wave

Thin film bulk acoustic wave resonator (TFBAR) gas sensor

2005 ◽  
Author(s):  
M. Benetti ◽  
D. Cannat ◽  
A. D'Amico ◽  
F. Di Pietrantonio ◽  
V. Foglietti ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Gas Sensor ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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