Modal characteristics of coupled MEMS resonator array under the effect of residual stress

2021 ◽  
pp. 113236
Author(s):  
Bo Peng ◽  
Kai-Ming Hu ◽  
Xiao-Yong Fang ◽  
Xiu-Yuan Li ◽  
Wen-Ming Zhang
Keyword(s):  
Residual Stress ◽  
Modal Characteristics ◽  
Mems Resonator

scholarly journals Evaluation of Residual Stress of C Oriented AlN/Si (111) and Its Impact on Mushroom Shaped Piezoelectric Resonator 

2021 ◽  
Author(s):  
AKHILESH PANDEY ◽  
Shankar Dutta ◽  
Nidhi Gupta ◽  
Davinder Kaur ◽  
R. Raman
Keyword(s):  
Residual Stress ◽  
Residual Stresses ◽  
Mode Shapes ◽  
Quality Factors ◽  
Resonator Structure ◽  
Resonator Design ◽  
Mems Resonator ◽  
Mems Resonators ◽  
Quality Factor Q ◽  
Preferred Oriented

Abstract Aluminum nitride-based MEMS resonators are one of the interesting recent research topics for its tremendous potential in a wide variety of applications. This paper focuses on the detrimental effect of residual stress on the AlN based MEMS resonator design for acoustic applications. The residual stress in the sputtered c axis (<001>) preferred oriented AlN layers on Si (111) substrates are studied as a function of layer thickness. The films exhibited compressive residual stresses at different thickness values: -1050 MPa (700 nm), -500 MPa (900 nm), and -230 MPa (1200 nm). A mushroom-shaped AlN based piezoelectric MEMS resonator structure has been designed for the different AlN layer thicknesses. The effect of the residual stresses on the mode shapes, resonant frequencies, and quality factor (Q) of the resonator structures are studied. The resonant frequency of the structures are altered from 235 kHz, 280 kHz, and 344 kHz to 65 kHz, 75 kHz and 371 kHz due to the residual stress of -1050 MPa (thickness: 700 nm), -500 MPa (thickness: 900 nm) and -230 MPa (thickness: 1200 nm) respectively. At no residual stress, the quality factors of the resonator structures are 248, 227, 241 corresponding to the 700 nm, 900 nm, and 1200 nm thick AlN layers respectively. The presence of the residual stress reduced the Q values from 248 (thickness: 700 nm), 227 (thickness: 900 nm), 241 (thickness: 1200 nm) to 28, 53, and 261 respectively.

Effect of residual stress on modes of coupled MEMS resonator array

2021 ◽  
Author(s):  
Bo Peng ◽  
Kaiming Hu ◽  
Xiaoyong Fang ◽  
Wenming Zhang
Keyword(s):  
Residual Stress ◽  
Mems Resonator

TEM investigations of surface residual stress relaxation in A12O3 and Al2O3-SiC nanocomposite

1994 ◽  
Vol 52 ◽  
pp. 628-629
Author(s):  
J. Fang ◽  
H. M. Chan ◽  
M. P. Harmer
Keyword(s):  
Residual Stress ◽  
Single Phase ◽  
Stress Relief ◽  
Stress Recovery ◽  
Surface Residual Stress ◽  
Microscopic Mechanism ◽  
Sic Particles ◽  
Annealing Procedure ◽  
The Difference ◽  
Nano Size

It was Niihara et al. who first discovered that the fracture strength of Al2O3 can be increased by incorporating as little as 5 vol.% of nano-size SiC particles (>1000 MPa), and that the strength would be improved further by a simple annealing procedure (>1500 MPa). This discovery has stimulated intense interest on Al2O3/SiC nanocomposites. Recent indentation studies by Fang et al. have shown that residual stress relief was more difficult in the nanocomposite than in pure Al2O3. In the present work, TEM was employed to investigate the microscopic mechanism(s) for the difference in the residual stress recovery in these two materials.Bulk samples of hot-pressed single phase Al2O3, and Al2O3 containing 5 vol.% 0.15 μm SiC particles were simultaneously polished with 15 μm diamond compound. Each sample was cut into two pieces, one of which was subsequently annealed at 1300° for 2 hours in flowing argon. Disks of 3 mm in diameter were cut from bulk samples.

Residual stress measurements and modeling of built-up Box-T sections

2021 ◽  
Vol 160 ◽  
pp. 107336
Author(s):  
Ziqian Zhang ◽  
Gang Shi ◽  
Xuesen Chen ◽  
Lijun Wang ◽  
Le Zhou
Keyword(s):  
Residual Stress ◽  
Stress Measurements

Comparative study of the effective parameters on residual stress relaxation in welded aluminum plates under cyclic loading

2020 ◽  
Vol 21 (5) ◽  
pp. 505
Author(s):  
Yousef Ghaderi Dehkordi ◽  
Ali Pourkamali Anaraki ◽  
Amir Reza Shahani
Keyword(s):  
Residual Stress ◽  
Cyclic Loading ◽  
Stress Relaxation ◽  
Stress Amplitude ◽  
Cyclic Plasticity ◽  
Mean Stress ◽  
Effective Parameters ◽  
Perfect Plasticity ◽  
Residual Stress Relaxation ◽  
Aluminum Plates

The prediction of residual stress relaxation is essential to assess the safety of welded components. This paper aims to study the influence of various effective parameters on residual stress relaxation under cyclic loading. In this regard, a 3D finite element modeling is performed to determine the residual stress in welded aluminum plates. The accuracy of this analysis is verified through experiment. To study the plasticity effect on stress relaxation, two plasticity models are implemented: perfect plasticity and combined isotropic-kinematic hardening. Hence, cyclic plasticity characterization of the material is specified by low cycle fatigue tests. It is found that the perfect plasticity leads to greater stress relaxation. In order to propose an accurate model to compute the residual stress relaxation, the Taguchi L18 array with four 3-level factors and one 6-level is employed. Using statistical analysis, the order of factors based on their effect on stress relaxation is determined as mean stress, stress amplitude, initial residual stress, and number of cycles. In addition, the stress relaxation increases with an increase in mean stress and stress amplitude.

Read and Write Operations of Memory Device Consisting of Nonlinear MEMS Resonator

2014 ◽  
Vol 1 ◽  
pp. 352-355 ◽  
Author(s):  
Atsushi YAO ◽  
Takashi HIKIHARA
Keyword(s):  
Memory Device ◽  
Mems Resonator
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