scholarly journals Orientation imaging of macro-sized polysilicon grains on wafers using spatially resolved acoustic spectroscopy

2017 ◽  
Vol 140 ◽  
pp. 67-70 ◽  
Author(s):  
Rikesh Patel ◽  
Wenqi Li ◽  
Richard J. Smith ◽  
Steve D. Sharples ◽  
Matt Clark
Author(s):  
Steve D. Sharples ◽  
Matt Clark ◽  
Mike G. Somekh ◽  
Elizabeth E. Sackett ◽  
Lionel Germain ◽  
...  

2012 ◽  
Vol 353 ◽  
pp. 012003 ◽  
Author(s):  
R Smith ◽  
S Sharples ◽  
W Li ◽  
M Clark ◽  
M Somekh

2014 ◽  
Vol 520 ◽  
pp. 012017 ◽  
Author(s):  
Wenqi Li ◽  
Jethro Coulson ◽  
John W Aveson ◽  
Richard J Smith ◽  
Matt Clark ◽  
...  

2006 ◽  
Vol 934 ◽  
Author(s):  
Rozaliya Barabash ◽  
C. Roder ◽  
G. E. Ice ◽  
S. Einfeldt ◽  
J. D. Budai ◽  
...  

ABSTRACTThe spatially resolved distribution of strain, misfit and threading dislocations, and crystallographic orientation in uncoalesced GaN layers grown on Si(111) substrates by maskless cantilever epitaxy was studied by white-beam Laue x-ray microdiffraction, scanning electron microscopy, and orientation imaging microscopy. Tilt boundaries formed at the column/wing interface with the misorientation strongly depending on the growth conditions. A depth-dependent deviatoric strain gradient is found in the GaN. Types and density of misfit dislocations as well as their arrangement within different dislocation arrays was quantified. The results are discussed with respect to the miscut of the Si(111) surface and misfit dislocations formed at the interface.


2014 ◽  
Vol 25 (5) ◽  
pp. 055902 ◽  
Author(s):  
Richard J Smith ◽  
Wenqi Li ◽  
Jethro Coulson ◽  
Matt Clark ◽  
Michael G Somekh ◽  
...  

2006 ◽  
Vol 14 (22) ◽  
pp. 10435 ◽  
Author(s):  
Steve D. Sharples ◽  
Matthew Clark ◽  
Mike G. Somekh

2016 ◽  
Vol 236 ◽  
pp. 93-102 ◽  
Author(s):  
Richard J. Smith ◽  
Matthias Hirsch ◽  
Rikesh Patel ◽  
Wenqi Li ◽  
Adam T. Clare ◽  
...  

2010 ◽  
Author(s):  
S. D. Sharpies ◽  
W. Li ◽  
M. Clark ◽  
M. G. Somekh ◽  
Donald O. Thompson ◽  
...  

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