Characterization of microvoids in thin hydrogenated amorphous silicon layers by spectroscopic ellipsometry and Fourier transform infrared spectroscopy

2015 ◽  
Vol 107 ◽  
pp. 50-53 ◽  
Author(s):  
Wenzhu Liu ◽  
Liping Zhang ◽  
Fanying Meng ◽  
Wanwu Guo ◽  
Jian Bao ◽  
...  
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