scholarly journals Theoretical study of subwavelength circular grating fabrication based on continuously exposed surface plasmon interference lithography

2019 ◽  
Vol 14 ◽  
pp. 102446 ◽  
Author(s):  
Xiangxian Wang ◽  
Zhiyuan Pang ◽  
Hua Yang ◽  
Yunping Qi
Keyword(s):  
Surface Plasmon ◽  
Theoretical Study ◽  
Interference Lithography ◽  
Exposed Surface ◽  
Grating Fabrication ◽  
Circular Grating

Theoretical fabrication of subwavelength structures by surface plasmon interference based on complementary grating

2022 ◽  
Author(s):  
Xiangxian Wang ◽  
Yaqian Ren ◽  
Tianxu Jia ◽  
Yingwen Su ◽  
Yunping Qi ◽  
...  
Keyword(s):  
Surface Plasmon ◽  
Theoretical Study ◽  
Reflectance Spectrum ◽  
Interference Lithography ◽  
Subwavelength Structures ◽  
Optimal Parameters ◽  
One Dimensional ◽  
Sample Rotation ◽  
Rotation Methods ◽  
Difference Time

This paper presents a surface plasmon interference lithography technique based on the complementary grating, which comprises silicon gratings and complementary aluminum grating masks, for fabricating subwavelength structures. In this theoretical study, the optimal parameters of the complementary grating structure were determined using the reflectance spectrum. The optical field distributions of one- and two-dimensional subwavelength structures were obtained using the finite-difference time-domain method and rotation-related formulas. The results of numerical evaluations show that a one-dimensional periodic structure with a half-pitch resolution of 60.5 nm (approximately [Formula: see text]/6.7) can be fabricated. In addition, subwavelength structures can be diversified using different rotation methods to expose the photolithography samples, such as square dot arrays and quasi-hexagonal closely packed structures. The proposed method combines surface plasmon interference with sample rotation, thereby enabling fabrication of abundant subwavelength structures.

Surface plasmon interference lithography with a surface relief metal grating

2013 ◽  
Vol 288 ◽  
pp. 122-126 ◽  
Author(s):  
Jianjie Dong ◽  
Juan Liu ◽  
Peng Liu ◽  
Jing Liu ◽  
Xingxing Zhao ◽  
...  
Keyword(s):  
Surface Plasmon ◽  
Surface Relief ◽  
Interference Lithography ◽  
Metal Grating

Long range surface plasmon interference lithography

2011 ◽  
Vol 88 (8) ◽  
pp. 2184-2187 ◽  
Author(s):  
Xiaowei Guo ◽  
Qiming Dong
Keyword(s):  
Long Range ◽  
Surface Plasmon ◽  
Interference Lithography
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