Wafer Level Fabrication of Vibrational Energy Harvesters using Bulk PZT Sheets
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2016 ◽
Vol 773
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pp. 012075
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2018 ◽
Vol 1052
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pp. 012018
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2020 ◽
Vol 139
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pp. 106642
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2021 ◽
Vol 149
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pp. 107171