On-line monitoring of parylene film deposition with quartz crystal microbalance (QCM)
Keyword(s):
On Line
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2019 ◽
Vol 23
(11n12)
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pp. 1495-1504
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2012 ◽
Vol 369
(1)
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pp. 103-110
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2000 ◽
Vol 239
(1-2)
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pp. 121-124
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1995 ◽
Vol 74-75
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pp. 528-533
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Keyword(s):
1997 ◽
Vol 440
(1-2)
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pp. 65-72