scholarly journals Precise Control of Metal Oxide Thin Films Deposition in Magnetron Sputtering Plasmas for High Performance Sensing Devices Fabrication

2016 ◽  
Vol 20 ◽  
pp. 93-97 ◽  
Author(s):  
Nayan Nafarizal
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Metal Oxide ◽  
High Performance ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Precise Control

scholarly journals Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range

Materials ◽  
2019 ◽  
Vol 12 (6) ◽  
pp. 877 ◽  
Author(s):  
Artur Rydosz ◽  
Andrzej Brudnik ◽  
Kamil Staszek
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Biomedical Applications ◽  
Tin Dioxide ◽  
Microwave Frequency ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Volatile Organic

Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0–200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO2-based gas sensors, while for methanol detection both dioxides, SnO2 and TiO2, exhibited good sensitivity.

Unique chemistries of metal-nitrate precursors to form metal-oxide thin films from solution: materials for electronic and energy applications

2019 ◽  
Vol 7 (42) ◽  
pp. 24124-24149 ◽  
Author(s):  
Elizabeth A. Cochran ◽  
Keenan N. Woods ◽  
Darren W. Johnson ◽  
Catherine J. Page ◽  
Shannon W. Boettcher
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
High Performance ◽  
Metal Nitrate ◽  
Oxide Thin Films ◽  
High Quality ◽  
Metal Oxide Thin Films ◽  
Solution Deposition ◽  
Energy Applications

Unique chemistries of metal-nitrate precursors that enable the preparation of high-quality, high-performance metal-oxide thin films by solution deposition are reviewed.

Characterization of metal-oxide thin films deposited by plasma-assisted reactive magnetron sputtering

2010 ◽  
Vol 8 (S1) ◽  
pp. 73-77 ◽  
Author(s):  
Stefan Jakobs Stefan Jakobs ◽  
Marc Lappschies Marc Lappschies ◽  
Uwe Schallenberg Uwe Schallenberg ◽  
Olaf Stenzel Olaf Stenzel ◽  
Steffen Wilbrandt Steffen Wilbrandt
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Metal Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films

scholarly journals Nano Fabrication of Functional Transition Metal Oxide Thin Films

2008 ◽  
Vol 51 (1) ◽  
pp. 37-43
Author(s):  
Naoki SUZUKI ◽  
Hidekazu TANAKA ◽  
Yoshihiko YANAGISAWA ◽  
Satoru YAMANAKA ◽  
Luca PELLEGRINO ◽  
...  
Keyword(s):  
Thin Films ◽  
Transition Metal ◽  
Metal Oxide ◽  
Transition Metal Oxide ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Nano Fabrication ◽  
Functional Transition
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