Design and characterization of a two-axis, flexure-based nanopositioning stage with 50 mm travel and reduced higher order modes
2018 ◽
Vol 53
◽
pp. 236-247
◽
Keyword(s):
2014 ◽
Vol 32
(23)
◽
pp. 4534-4538
◽
2013 ◽
Vol 72
(2)
◽
pp. 111-123
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 21
(6)
◽
Keyword(s):