Simulation of mechanical properties of epoxy-based chemically amplified resist by coarse-grained molecular dynamics

Polymer ◽  
2012 ◽  
Vol 53 (21) ◽  
pp. 4834-4842 ◽  
Author(s):  
Hiromasa Yagyu ◽  
Yoshikazu Hirai ◽  
Akio Uesugi ◽  
Yoshihide Makino ◽  
Koji Sugano ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Coarse Grained ◽  
Chemically Amplified ◽  
Chemically Amplified Resist ◽  
Coarse Grained Molecular Dynamics

Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application

2012 ◽  
Vol 1415 ◽  
Author(s):  
Hiromasa Yagyu ◽  
Yoshikazu Hirai ◽  
Akio Uesugi ◽  
Yoshihide Makino ◽  
Koji Sugano ◽  
...  
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Dynamics Simulation ◽  
Coarse Grained ◽  
Cross Linking ◽  
Spring Model ◽  
Chemically Amplified ◽  
Calculation Step ◽  
Chemically Amplified Resist ◽  
Coarse Grained Molecular Dynamics

ABSTRACTA unique simulation method of epoxy-based chemically-amplified resist by coarse-grained molecular dynamics was proposed. The mechanical properties of an epoxy-based chemically-amplified resists with various cross-linking ratios were simulated using a newly developed coarse-grained molecular dynamics simulation that employs a bead-spring model. Models with the different cross-linking ratios were created in the molecular dynamics calculation step and uniaxial elongation simulations were performed. The results reveal that the simulated elastic modulus of the resist modeled by the bead-spring model with an extended angle bending potential depends on the cross-linking ratio; its dependency exhibits good agreement with that determined by nanoindentation tests.

Structural and mechanical properties of advanced polymer gels with rigid side-chains using coarse-grained molecular dynamics

Polymer ◽  
2014 ◽  
Vol 55 (20) ◽  
pp. 5266-5275 ◽  
Author(s):  
Yelena R. Sliozberg ◽  
Tanya L. Chantawansri ◽  
Joseph L. Lenhart ◽  
Jan W. Andzelm
Keyword(s):  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Polymer Gels ◽  
Coarse Grained ◽  
Side Chains ◽  
Coarse Grained Molecular Dynamics

scholarly journals Tailoring the mechanical properties of polymer nanocomposites via interfacial engineering

2019 ◽  
Vol 21 (34) ◽  
pp. 18714-18726 ◽  
Author(s):  
Naishen Gao ◽  
Guanyi Hou ◽  
Jun Liu ◽  
Jianxiang Shen ◽  
Yangyang Gao ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Polymer Nanocomposites ◽  
Coarse Grained ◽  
Enhancement Effect ◽  
Interfacial Engineering ◽  
Dynamics Simulations ◽  
Coarse Grained Molecular Dynamics

Using coarse-grained molecular-dynamics simulations, we have successfully fabricated ideal, mechanically-interlocked polymer nanocomposites exhibiting a significant mechanical enhancement effect.

Self-assembly and structural manipulation of diblock-copolymer grafted nanoparticles in a homopolymer matrix

2019 ◽  
Vol 21 (22) ◽  
pp. 11785-11796 ◽  
Author(s):  
Sai Li ◽  
Zhiyu Zhang ◽  
Guanyi Hou ◽  
Jun Liu ◽  
Yangyang Gao ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Molecular Dynamics ◽  
Molecular Dynamics Simulations ◽  
Diblock Copolymer ◽  
Self Assembly ◽  
Coarse Grained ◽  
Grafted Nanoparticles ◽  
Structural Manipulation ◽  
Dynamics Simulations ◽  
Coarse Grained Molecular Dynamics

Detailed coarse-grained molecular dynamics simulations are performed to investigate the structural and mechanical properties of nanoparticles (NPs) grafted with an amphiphilic AB diblock copolymer, with the A-block being compatible with NPs and the B-block being miscible with a homopolymer matrix.

Sign in / Sign up

Export Citation Format

Share Document