Synthesis and characterization of metal substituted AlxCr1−x(acetylacetonate)3 single-source precursors for their application to MOCVD of thin films
Keyword(s):
1999 ◽
Vol 09
(PR8)
◽
pp. Pr8-943-Pr8-951
◽
Keyword(s):
Keyword(s):
Keyword(s):