The optical emission spectroscopy of nitrogen plasma driven by the 94.92 MHz/13.56 MHz dual-frequency

2020 ◽  
Vol 384 (12) ◽  
pp. 126367
Author(s):  
Qianghua Yuan ◽  
Pei Ren ◽  
Shanshan Liu ◽  
Jingjing Wang ◽  
Guiqin Yin
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Plasma ◽  
Dual Frequency

scholarly journals Analysis of Optical Emission Spectra during Nitrogen-Plasma Treatment to Control the Wettability of Polystyrene Surface

2021 ◽  
Vol 20 (3) ◽  
Author(s):  
Masruroh ◽  
Dionysius J. D. H. Santjojo ◽  
Ahmad Taufiq
Keyword(s):  
Plasma Treatment ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Plasma ◽  
Chamber Pressure ◽  
Treatment Results ◽  
Plasma Species ◽  
Dc Bias ◽  
Nitrogen Treatment

In this work, we apply optical emission spectroscopy to investigate active plasma species to study that plasma nitrogen treatment affects polystyrene surfaces. Data concerning these active plasma species are crucial for exploring the polystyrene layer's functionality deposited on quartz crystal microbalance (QCM) surface. Wettability function in biosensors development is essential aspects for biomolecule immobilization. The surface of the polystyrene layer was modified by plasma nitrogen treatment. The process parameters affecting plasma species and characteristic, and hence the treatment results studied in this work were chamber pressure, flow rate, and DC bias. The plasma analysis was conducted by optical emission spectroscopy. The spectroscopy was utilized to predict the active species of plasma, the electron temperature Te and the electron density Ne. The dominant reactive species was N2+ which go through different plasma interactions and on the polystyrene surface depending on the DC bias voltage, the nitrogen- gas flow rate, and the chamber pressure. The plasma treatment results suggest that the ion bombardment was the dominant mechanism that changes the polystyrene's surface. The plasma behavior and surface interactions were found complex with the variation of the process parameter. Keywords: Electron density, Electron temperature, OES, Nitrogen-plasma treatment, Wettability

Trace-Rare-Gas Optical Emission Spectroscopy of Nitrogen Plasma Generated at a Frequency of 13.56 MHz

2011 ◽  
Vol 13 (2) ◽  
pp. 208-212 ◽  
Author(s):  
N. U Rehman ◽  
F. U Khan ◽  
S Naseer ◽  
G Murtaza ◽  
S. S Hussain ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Plasma ◽  
Rare Gas

Optical Emission Spectroscopy of Abnormal Glow Region in Nitrogen Plasma

2005 ◽  
Vol 25 (5) ◽  
pp. 551-564 ◽  
Author(s):  
A. Qayyum ◽  
Shaista Zeb ◽  
Shujaat Ali ◽  
A. Waheed ◽  
M. Zakaullah
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Plasma

Analysis of optical emission spectroscopy in a dual-frequency capacitively coupled CHF3 plasma

2009 ◽  
Vol 16 (4) ◽  
pp. 043509 ◽  
Author(s):  
Xiao-Jiang Huang ◽  
Yu Xin ◽  
Lei Yang ◽  
Chao Ye ◽  
Qiang-Hua Yuan ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled

Optical emission spectroscopy of the active species in nitrogen plasma

2006 ◽  
Vol 14 (1) ◽  
pp. 61-70 ◽  
Author(s):  
A. Qayyum ◽  
Shaista Zeb ◽  
M. A. Naveed ◽  
S. A. Ghauri ◽  
A. Waheed ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Nitrogen Plasma ◽  
Active Species

CHF 3 Dual-Frequency Capacitively Coupled Plasma by Optical Emission Spectroscopy

2008 ◽  
Vol 25 (8) ◽  
pp. 2942-2945 ◽  
Author(s):  
Xu Yi-Jun ◽  
Ye Chao ◽  
Huang Xiao-Jiang ◽  
Yuan Jing ◽  
Xing Zhen-Yu ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma
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