Simulation study of the sheath region of a processing plasma with two-temperature electrons and charged nanoparticles
2012 ◽
Vol 376
(33)
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pp. 2244-2251
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2009 ◽
Vol 113
(42)
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pp. 13860-13865
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2009 ◽
Vol 130
(4)
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pp. 044701
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