The effect of low energy helium implantation on the structural, vibrational, and piezoelectric properties of AlN thin films
Optimization of the annealing process and nanoscale piezoelectric properties of (002) AlN thin films
2017 ◽
Vol 28
(13)
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pp. 9295-9300
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Keyword(s):
2013 ◽
Vol 52
(40)
◽
pp. 14328-14334
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