scholarly journals Optical Properties of Diamond-like Carbon Films for Antireflection Coating by RF Magnetron Sputtering Method

2011 ◽  
Vol 18 ◽  
pp. 46-50 ◽  
Author(s):  
C.R. Lin ◽  
D.H. Wei ◽  
C.K. Chang ◽  
W.H. Liao
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Antireflection Coating ◽  
Carbon Films ◽  
Diamond Like Carbon

scholarly journals Optical Properties of Ta2O5/SiO2 Antireflection Coating System

2011 ◽  
Vol 2-3 ◽  
pp. 167-171
Author(s):  
Shao Ni Sun ◽  
Li Yang Xie ◽  
Yi Chen Zhang ◽  
Ying Huang
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Growth Parameters ◽  
Rf Magnetron Sputtering ◽  
Antireflection Coating ◽  
Coating System ◽  
Working Pressure ◽  
Pressure Oxygen ◽  
K9 Glass

The Ta2O5/SiO2 Multi-layer Antireflection Coating Is Prepared on K9 Glass by RF Magnetron Sputtering Technology in the Experiment. the Growth Parameters Are Changed to Get Multi-layer Antireflection Film with Good Optical Properties. in the Technical Research, the Influence of Various Growth Parameters, Including Working Pressure, Oxygen Content, Substrate Temperature, Etc., on the Optical Properties and Structures of the Coatings Are Studied. Optical Properties and Morphological Features such as Surface, Structure Are Investigated by UV-VIS Spectrophotometer and AFM, Respectively. the Detecting Results Further Verify the Important Influences of Proper Growth Parameters on Optical Properties of Antireflection Coating.

Influence of RF PACVD process parameters of diamond-like carbon films on optical properties and nano-hardness of the films

2008 ◽  
Vol 17 (7-10) ◽  
pp. 1655-1659 ◽  
Author(s):  
M. Smietana ◽  
J. Szmidt ◽  
M.L. Korwin-Pawlowski ◽  
N. Miller ◽  
A.A. Elmustafa
Keyword(s):  
Optical Properties ◽  
Process Parameters ◽  
Carbon Films ◽  
Diamond Like Carbon

Structural and optical properties of N-doped β-Ga2O3 films deposited by RF magnetron sputtering

2011 ◽  
Vol 406 (15-16) ◽  
pp. 3079-3082 ◽  
Author(s):  
Yijun Zhang ◽  
Jinliang Yan ◽  
Qingshan Li ◽  
Chong Qu ◽  
Liying Zhang ◽  
...  
Keyword(s):  
Optical Properties ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Structural And Optical Properties
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