scholarly journals Formation of Periodic Nanoripples on Silicon and Germanium Induced by Femtosecond Laser Pulses

2011 ◽  
Vol 12 ◽  
pp. 29-36 ◽  
Author(s):  
R. Le Harzic ◽  
D. Dörr ◽  
D. Sauer ◽  
M. Neumeier ◽  
M. Epple ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Silicon And Germanium

Ablation of Si and Ge Using UV Femtosecond Laser Pulses

1995 ◽  
Vol 397 ◽  
Author(s):  
G. Herbst ◽  
M. Steiner ◽  
G. Marowsky ◽  
E. Matthias
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Material Removal ◽  
Laser Pulses ◽  
Ablation Rate ◽  
Femtosecond Laser Pulses ◽  
Bond Breaking ◽  
Intensity Enhancement ◽  
Silicon And Germanium

ABSTRACTLaser ablation of silicon and germanium was carried out in moderate vacuum with l00fs to 400fs pulses at 248nm and intensities up to 3x1013 W/cm2. Evidence for non-thermal material removal was found. Imaged multishot ablation patterns display the intensity dependent self-structuring effect, forming well-known columnar structures. It is shown that continued irradiation of these structures eventually results in comparatively clean ablation. An increase of ablation rate with depth was observed. The reason is an intensity enhancement inside the pits by reflective focussing to a level where bond-breaking takes place. Furthermore, it was noticed that ablation contours can be significantly improved by electrically grounding the target.

scholarly journals Фемтосекундный лазерный отжиг многослойных тонкопленочных структур на основе аморфных германия и кремния

2020 ◽  
Vol 46 (11) ◽  
pp. 43
Author(s):  
А.В. Колчин ◽  
Д.В. Шулейко ◽  
А.В. Павликов ◽  
С.В. Заботнов ◽  
Л.А. Головань ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Amorphous Silicon ◽  
Laser Annealing ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Surface Structures ◽  
Multilayered Structures ◽  
Spectra Analysis ◽  
Periodic Surface ◽  
Silicon And Germanium

Femtosecond laser annealing of thin-film multilayered structures based on amorphous silicon and germanium were studied. The original samples were synthesized via plasma-enhanced deposition on glass substrate. Scanning electron microscopy revealed formation of periodic surface structures in the irradiated films. Raman spectra analysis revealed crystallization of amorphous germanium as a result of femtosecond laser pulses action, as well as fluence-dependent mixture of the germanium and silicon layers at absence of crystallization of the amorphous silicon layers.

Inorganic-organic Hybrid Materials for Real 3-D Sub-νm Lithography

2003 ◽  
Vol 780 ◽  
Author(s):  
R. Houbertz ◽  
J. Schulz ◽  
L. Fröhlich ◽  
G. Domann ◽  
M. Popall ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Sol Gel ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Hybrid Polymer ◽  
Organic Hybrid ◽  
Two Photon ◽  
Applied Technology ◽  
Scale Structures ◽  
Sol Gel Synthesis

AbstractReal 3-D sub-νm lithography was performed with two-photon polymerization (2PP) using inorganic-organic hybrid polymer (ORMOCER®) resins. The hybrid polymers were synthesized by hydrolysis/polycondensation reactions (modified sol-gel synthesis) which allows one to tailor their material properties towards the respective applications, i.e., dielectrics, optics or passivation. Due to their photosensitive organic functionalities, ORMOCER®s can be patterned by conventional photo-lithography as well as by femtosecond laser pulses at 780 nm. This results in polymerized (solid) structures where the non-polymerized parts can be removed by conventional developers.ORMOCER® structures as small as 200 nm or even below were generated by 2PP of the resins using femtosecond laser pulses. It is demonstrated that ORMOCER®s have the potential to be used in components or devices built up by nm-scale structures such as, e.g., photonic crystals. Aspects of the materials in conjunction to the applied technology are discussed.

Ablation of metals with femtosecond laser pulses

2001 ◽  
Author(s):  
K. H. Leong ◽  
T. Y. Plew ◽  
R. L. Maynard ◽  
A. A. Said ◽  
L. A. Walker
Keyword(s):  
Femtosecond Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses

Picosecond Single-Photon and Femtosecond Two-Photon Pulsed Laser Stimulation for IC Characterization and Failure Analysis

2009 ◽  
Author(s):  
V. Pouget ◽  
E. Faraud ◽  
K. Shao ◽  
S. Jonathas ◽  
D. Horain ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Single Photon ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Ultrashort Laser Pulses ◽  
Laser Stimulation ◽  
Two Photon ◽  
Resolution Improvement ◽  
Ultrashort Laser

Abstract This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.

Storing energy in lithium fluoride crystals irradiated with femtosecond laser pulses

2016 ◽  
Vol 80 (1) ◽  
pp. 85-88 ◽  
Author(s):  
V. P. Dresvyanskiy ◽  
M. A. Moiseeva ◽  
A. V. Kuznetsov ◽  
D. S. Glazunov ◽  
B. Chadraa ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Lithium Fluoride ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Fluoride Crystals

scholarly journals Regulating disordered plasmonic nanoparticles into polarization sensitive metasurfaces

Nanophotonics ◽  
2021 ◽  
Vol 0 (0) ◽  
Author(s):  
Shulei Li ◽  
Mingcheng Panmai ◽  
Shaolong Tie ◽  
Yi Xu ◽  
Jin Xiang ◽  
...  
Keyword(s):  
Femtosecond Laser ◽  
Spatial Resolution ◽  
Metallic Nanoparticles ◽  
Near Infrared ◽  
Optical Memory ◽  
Laser Pulses ◽  
Femtosecond Laser Pulses ◽  
Optical Diffraction ◽  
Plasmonic Nanoparticles ◽  
Direct Laser

Abstract Metasurfaces composed of regularly arranged and deliberately oriented metallic nanoparticles can be employed to manipulate the amplitude, phase and polarization of an incident electromagnetic wave. The metasurfaces operating in the visible to near infrared spectral range rely on the modern fabrication technologies which offer a spatial resolution beyond the optical diffraction limit. Although direct laser writing is an alternative to the fabrication of nanostructures, the achievement of regular nanostructures with deep-subwavelength periods by using this method remains a big challenge. Here, we proposed and demonstrated a novel strategy for regulating disordered plasmonic nanoparticles into nanogratings with deep-subwavelength periods and reshaped nanoparticles by using femtosecond laser pulses. The orientations of the nanogratings depend strongly on the polarization of the femtosecond laser light. Such nanogratings exhibit reflection and polarization control over the reflected light, enabling the realization of polarization sensitive optical memory and color display with high spatial resolution and good chromacity.

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