Fabrication of large-scale multilevel phase-type Fresnel zone plate arrays by femtosecond laser direct writing

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Herein, we report a novel optical glass material, fluoroaluminate (AlF3) glass, with excellent optical transmittance from ultraviolet to infrared wavelength ranges, which provides more options for application in optical devices. Based on its performance, the phase-type Fresnel zone plate (FZP) by ultraviolet femtosecond (fs) laser-inscribed lithography is achieved, which induces the refractive index change by fs-laser tailoring. The realization of ultraviolet fs-laser fabrication inside glass can benefit from the excellent optical performance of the AlF3 glass. Compared with traditional surface-etching micro-optical elements, the phase-type FZP based on AlF3 glass exhibits a clear and well-defined geometry and presents perfect environmental suitability without surface roughness problems. Additionally, optical focusing and multi-wavelength imaging can be easily obtained. Phase-type FZP embedded in AlF3 glass has great potential applications in the imaging and focusing in glass-integrated photonics, especially for the ultraviolet wavelength range.


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...  

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