A novel design for maskless direct laser writing nanolithography: Combination of diffractive optical element and nonlinear absorption inorganic resists

2013 ◽  
Vol 304 ◽  
pp. 49-53 ◽  
Author(s):  
Yikun Zha ◽  
Jingsong Wei ◽  
Fuxi Gan
ACS Photonics ◽  
2016 ◽  
Vol 3 (5) ◽  
pp. 886-894 ◽  
Author(s):  
T. Patrick Xiao ◽  
Osman S. Cifci ◽  
Samarth Bhargava ◽  
Hao Chen ◽  
Timo Gissibl ◽  
...  

Author(s):  
Renato Grigolon Capelo ◽  
Juliana M.P. Almeida ◽  
Douglas Faza Franco ◽  
Gael Yves Poirier ◽  
Cleber Renato Mendonça ◽  
...  

2013 ◽  
Vol 3 (10) ◽  
pp. 1660 ◽  
Author(s):  
Wei-Er Lu ◽  
Yong-Liang Zhang ◽  
Mei-Ling Zheng ◽  
Yan-Peng Jia ◽  
Jie Liu ◽  
...  

2011 ◽  
Author(s):  
Vygantas Mizeikis ◽  
Vytautas Purlys ◽  
Lina Maigyte ◽  
Kestutis Staliunas ◽  
Saulius Juodkazis

2021 ◽  
Vol 141 ◽  
pp. 107124
Author(s):  
D.V. Bochek ◽  
K.B. Samusev ◽  
D.A. Yavsin ◽  
M.V. Zhukov ◽  
M.F. Limonov ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document