Dynamic characterization of MEMS diaphragm using time averaged in-line digital holography
2007 ◽
Vol 280
(2)
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pp. 285-290
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Keyword(s):
2001 ◽
Vol 96
(1)
◽
pp. 151-159
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Keyword(s):
1978 ◽
Vol 27
(4)
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pp. 409-413