Two-wavelength phase-shifting interferometry using an electrically addressed liquid crystal spatial light modulator

2004 ◽  
Vol 242 (1-3) ◽  
pp. 1-6 ◽  
Author(s):  
Youichi Bitou
Keyword(s):  
Liquid Crystal ◽  
Spatial Light Modulator ◽  
Phase Shifting ◽  
Light Modulator ◽  
Phase Shifting Interferometry

Phase shifting interferometry using a spatial light modulator to measure optical thin films

2015 ◽  
Vol 54 (26) ◽  
pp. 7997 ◽  
Author(s):  
Brenda Villalobos-Mendoza ◽  
Fermín S. Granados-Agustín ◽  
Daniel Aguirre-Aguirre ◽  
Alejandro Cornejo-Rodríguez
Keyword(s):  
Thin Films ◽  
Spatial Light Modulator ◽  
Phase Shifting ◽  
Light Modulator ◽  
Phase Shifting Interferometry

A New Method for Testing the Asphere Surface with a Liquid Crystal Spatial Light Modulator

2014 ◽  
Vol 599-601 ◽  
pp. 27-31
Author(s):  
Di Fan
Keyword(s):  
Liquid Crystal ◽  
Spatial Light Modulator ◽  
Phase Shifting ◽  
New Method ◽  
Light Modulator ◽  
Spherical Lens ◽  
Aspheric Mirror ◽  
On Line ◽  
Form Deviation ◽  
Carrier Phase Shifting

Due to the special properties of asphere lens, the testing of it is more difficult than that of spherical lens. In this paper, the development of a new method using the liquid crystal spatial light modulator (SLM) to measure the accuracy of an aspheric surface is presented. The surface form was measured using a new component as the compensator lens in conjunction to provide an interferogram representing the aspheric form deviation from the nominal. Interferograms are decoded using a spatial-carrier phase shifting technique. The interferometric data is compared to data obtained using a contact stylus profilometer. The system can be mounted over a polishing machine and used for on-line testing of aspheric mirror surfaces.

scholarly journals High-Accuracy Surface Profile Measurement Based on the Vortex Phase-Shifting Interferometry

2021 ◽  
Vol 2021 ◽  
pp. 1-8
Author(s):  
Donge Zhao ◽  
Chaozheng Jia ◽  
Yayun Ma ◽  
Xuefeng Yang ◽  
Bin Zhang ◽  
...  
Keyword(s):  
Phase Modulation ◽  
Spatial Light Modulator ◽  
Surface Profile ◽  
Phase Shifting ◽  
Profile Measurement ◽  
Vortex Beam ◽  
Light Modulator ◽  
Vortex Phase ◽  
Phase Shifting Interferometry ◽  
Nonlinear Phase

According to the principle of phase-shifting interferometry and spiral phase characteristics of the vortex beam, this article proposes a method for detecting the surface profile of a transparent object, in which the +1 order vortex beam is generated by a spatial light modulator and is taken as the reference light. The influence of the nonlinear phase modulation characteristics of the spatial light modulator on the measurement precision is studied. The results show that nonlinear phase modulation has a great impact on the measurement. Then, the vortex lights with initial phases of 0, π/2, π, and 3π/2 are used to measure the H-type thin film sample based on the Twyman-Green interference system after correcting the nonlinear phase modulation characteristics. The experimental results show that the measurement error of the surface profile to an object with the theoretical value of 20 nm is 1.146 nm, and the feasibility of the optical vortex phase-shifting technique used to measure the surface profile of an object is verified.

128 x 128 analog liquid crystal spatial light modulator

1995 ◽  
Author(s):  
Steven A. Serati ◽  
Gary D. Sharp ◽  
Roylnn A. Serati ◽  
Douglas J. McKnight ◽  
Jay E. Stockley
Keyword(s):  
Liquid Crystal ◽  
Spatial Light Modulator ◽  
Light Modulator
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