scholarly journals High-resolution three-dimensional imaging of a depleted CMOS sensor using an edge Transient Current Technique based on the Two Photon Absorption process (TPA-eTCT)

2017 ◽  
Vol 845 ◽  
pp. 69-71 ◽  
Author(s):  
Marcos Fernández García ◽  
Javier González Sánchez ◽  
Richard Jaramillo Echeverría ◽  
Michael Moll ◽  
Raúl Montero Santos ◽  
...  
Keyword(s):  
High Resolution ◽  
Three Dimensional ◽  
Transient Current ◽  
Photon Absorption ◽  
Absorption Process ◽  
Three Dimensional Imaging ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Current Technique ◽  
Cmos Sensor

Fabrication of Three-Dimensional Micro-Structures with Two-Photon Absorption by Femtosecond Laser

2006 ◽  
Vol 532-533 ◽  
pp. 568-571
Author(s):  
Ming Zhou ◽  
Hai Feng Yang ◽  
Li Peng Liu ◽  
Lan Cai
Keyword(s):  
Photonic Crystal ◽  
Femtosecond Laser ◽  
Detection System ◽  
Three Dimensional ◽  
Photon Absorption ◽  
Micro Fabrication ◽  
Two Photon Absorption ◽  
Two Photon ◽  
Photo Polymerization ◽  
System A

The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confined in the focus because the efficiency of TPA is proportional to the square of intensity. Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of the focus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed. The system consists of a laser system, a microscope system, a real-time detection system and a 3D-movement system, etc. The precision of micro-machining reaches a level down to 700nm linewidth. The line width was inversely proportional to the fabrication speed, but proportional to laser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA cross section of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did some research about its applications. With TPA photo-polymerization by means of our experimental system, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber are manufactured. These results proved that the micro-fabrication system of TPA can not only obtain the resolution down to sub-micron level, but also realize real 3D micro-fabrication.

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