Study on sputtering yield of tungsten with different particle sizes: Surface roughness dependence
2013 ◽
Vol 389
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pp. 281-283
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Keyword(s):
Keyword(s):
2019 ◽
Vol 52
(9-10)
◽
pp. 1272-1281
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Keyword(s):
2019 ◽
Vol 29
(3)
◽
pp. 1439-1444