Cu-SiO2 hybrid bonding simulation including surface roughness and viscoplastic material modeling: A critical comparison of 2D and 3D modeling approach

2018 ◽  
Vol 86 ◽  
pp. 1-9 ◽  
Author(s):  
Thomas Wlanis ◽  
René Hammer ◽  
Werner Ecker ◽  
Sandrine Lhostis ◽  
Clément Sart ◽  
...  
2008 ◽  
Author(s):  
Antony Price ◽  
Patrick Turpin ◽  
Michel Erbetta ◽  
Don Watts ◽  
Graeme Cairns

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